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Kirankumar Savandaiah

Applied Materials

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Publication

Featured researches published by Kirankumar Savandaiah.

Archive | 2010

HIGH PRESSURE RF-DC SPUTTERING AND METHODS TO IMPROVE FILM UNIFORMITY AND STEP-COVERAGE OF THIS PROCESS

Adolph Miller Allen; Lara Hawrylchak; Zhigang Xie; Muhammand M. Rasheed; Rongjun Wang; Xianmin Tang; Zhendong Liu; Tza-Jing Gung; Srinivas Gandikota; Mei Chang; Michael S. Cox; Donny Young; Kirankumar Savandaiah; Zhenbin Ge

Archive | 2011

APPARATUS FOR PHYSICAL VAPOR DEPOSITION HAVING CENTRALLY FED RF ENERGY

Muhammad Rasheed; Lara Hawrylchak; Michael S. Cox; Donny Young; Kirankumar Savandaiah; Alan Ritchie

Archive | 2014

PROCESS KIT SHIELD FOR PLASMA ENHANCED PROCESSING CHAMBER

Muhammad Rasheed; Donny Young; Kirankumar Savandaiah; Uday Pai

Archive | 2016

ONE-PIECE PROCESS KIT SHIELD

Kirankumar Savandaiah; Ryan Hanson; Ruxiao An

Archive | 2015

Pedestal fluid-based thermal control

Eng Sheng Peh; Sriskantharajah Thirunavukarasu; Karthik Elumalai; Kirankumar Savandaiah

Archive | 2013

APPARATUS FOR GAS INJECTION IN A PHYSICAL VAPOR DEPOSITION CHAMBER

Muhammad Rasheed; Kirankumar Savandaiah; Alan Ritchie; Isaac Porras; Keith A. Miller

Archive | 2011

Adjustable process spacing, centering, and improved gas conductance

Lara Hawrylchak; Kirankumar Savandaiah

Archive | 2017

ONE-PIECE PROCESS KIT SHIELD FOR REDUCING THE IMPACT OF AN ELECTRIC FIELD NEAR THE SUBSTRATE

William Johanson; Kirankumar Savandaiah

Archive | 2015

METHODS AND APPARATUS FOR RAPIDLY COOLING A SUBSTRATE

Jallepally Ravi; Steven V. Sansoni; Kirankumar Savandaiah

Archive | 2013

Selectively groundable cover ring for substrate process chambers

Muhammad Rasheed; Kirankumar Savandaiah; William Johanson; Zhenbin Ge; Goichi Yoshidome

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Collaboration

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Muhammad Rasheed

Applied Materials

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William Johanson

Applied Materials

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Lara Hawrylchak

Applied Materials

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Sriskantharajah Thirunavukarasu

Applied Materials

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Xin Wang

Applied Materials

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Alan Ritchie

Applied Materials

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Ananthkrishna Jupudi

Applied Materials

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Donny Young

Applied Materials

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Junqi Wei

Applied Materials

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Yueh Sheng Ow

Applied Materials

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