Stefan Geyer | Researchain

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Publication

Featured researches published by Stefan Geyer.

Archive | 2005

Wafer level packages for chips with sawn edge protection

Stefan Geyer

Archive | 1998

Solution of tetramethylammonium hydroxide in water and a process for preparing the solution

Stefan Geyer; Michael Horn

Archive | 2009

Slurry Transport And Storage System

Stefan Geyer

Archive | 2002

Valve for a slurry outlet opening of a chemical mechanical polishing device and chemical mechanical polishing device having a valve

Stefan Geyer; Andreas Fischer

Archive | 2008

Integrated circuit including conductive bumps

Stefan Geyer

Archive | 2005

Wafer level package for chip, i.e. dynamic random access memory, comprises chip bonded to fiber reinforced synthetic resin sheet and polymer coating on edges of chip and resin sheet

Stefan Geyer

Archive | 2005

Photomaske und Verfahren zur Verwendung der Photomaske in einer Belichtungsanlage

Lothar Bauch; Anja Bonness; Jens Uwe Bruch; Stefan Geyer; Heiko Hommen; Patrick Klingbeil; Dieter Nees; Roberto Schiwon; Karl Schumacher; Jens Stäcker

Archive | 2005

Method for removing metal traces/tracks from solid silicon e.g. for manufacture of integrated circuits, involves bringing arsenic-containing gaseous mixture into contact with silicon

Stefan Geyer

Archive | 2005

Raster electron microscope process to monitor the presence of corrosive substances present in the vicinity of semiconductor manufacture

Stefan Geyer

Archive | 2005

Lithographic projection photo-mask, useful e.g. in structuring semiconductor wafers to form integrated circuits, includes absorber in purging gas volume above substrate to inhibit crystal formation

Lothar Bauch; Anja Bonness; Jens Uwe Bruch; Stefan Geyer; Heiko Hommen; Patrick Klingbeil; Dieter Nees; Roberto Schiwon; Karl Schumacher; Jens Stäcker

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