Stefan Geyer

Wafer level packages for chips with sawn edge protection

Solution of tetramethylammonium hydroxide in water and a process for preparing the solution

Slurry Transport And Storage System

Valve for a slurry outlet opening of a chemical mechanical polishing device and chemical mechanical polishing device having a valve

Integrated circuit including conductive bumps

Wafer level package for chip, i.e. dynamic random access memory, comprises chip bonded to fiber reinforced synthetic resin sheet and polymer coating on edges of chip and resin sheet

Photomaske und Verfahren zur Verwendung der Photomaske in einer Belichtungsanlage

Method for removing metal traces/tracks from solid silicon e.g. for manufacture of integrated circuits, involves bringing arsenic-containing gaseous mixture into contact with silicon

Raster electron microscope process to monitor the presence of corrosive substances present in the vicinity of semiconductor manufacture

Lithographic projection photo-mask, useful e.g. in structuring semiconductor wafers to form integrated circuits, includes absorber in purging gas volume above substrate to inhibit crystal formation