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Stegemann Maik

Infineon Technologies

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Publication

Featured researches published by Stegemann Maik.

Archive | 2000

Herstellungsverfahren für eine halbleiterstruktur

Genz Oliver; Kirchhoff Markus; Machill Stefan; Reb Alexander; Schmidt Barbara; Stavrev Momtchil; Stegemann Maik; Wege Stephan

Archive | 2003

Photolithographisches Strukturierungsverfahren mit einer durch ein plasmaunterstützes Abscheideeverfahren hergestellten Kohlenstoff-Hartmaskenschicht diamantartiger Härte

Kirchhoff Markus; Wege Stephan; Stegemann Maik; Vogt Mirko

Archive | 2005

Process for the production of a semiconductor apparatus

Rogalli Michael; Reb Alexander; Voelkel Lars; Stegemann Maik

Archive | 2018

Drucksensorvorrichtung und Herstellungsverfahren

Kautzsch Thoralf; Vogt Mirko; Stegemann Maik; Roeth Andre; Haubold Marco; Froehlich Heiko

Archive | 2017

Lichtemitterbauelemente, optische Filterstrukturen und Verfahren zum Bilden von Lichtemitterbauelementen und optischen Filterstrukturen

Kautzsch Thoralf; Vogt Mirko; Froehlich Heiko; Rudolph Uwe; Scire Alessia; Stegemann Maik

Archive | 2016

Strahler und Verfahren zu dessen Herstellung

Kautzsch Thoralf; Fröhlich Heiko; Vogt Mirko; Stegemann Maik; Bieselt Steffen

Archive | 2004

Etching gas and process for dry etching

Stegemann Maik; Wege Stephan

Archive | 2003

Procedure for anisotropic dry etching of an organic anti-reflective layers

Richter Harald Dr; Wege Stephan; Stegemann Maik

Archive | 2002

Method to produce a planar mask at a topology-containing surface

Stegemann Maik; Uhlig Ines

Archive | 2002

Verfahren zur Herstellung einer planaren Maske auf topologiehaltigen Oberflächen

Stegemann Maik; Uhlig Ines

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Collaboration

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Wege Stephan

Infineon Technologies

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Vogt Mirko

Infineon Technologies

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Kautzsch Thoralf

Infineon Technologies

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Froehlich Heiko

Infineon Technologies

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Kirchhoff Markus

Infineon Technologies

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Reb Alexander

Infineon Technologies

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Uhlig Ines

Infineon Technologies

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Bieselt Steffen

Infineon Technologies

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Genz Oliver

Infineon Technologies

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Machill Stefan

Infineon Technologies

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