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Wege Stephan

Infineon Technologies

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Publication

Featured researches published by Wege Stephan.

Archive | 2000

Herstellungsverfahren für eine halbleiterstruktur

Genz Oliver; Kirchhoff Markus; Machill Stefan; Reb Alexander; Schmidt Barbara; Stavrev Momtchil; Stegemann Maik; Wege Stephan

Archive | 2001

Electrical wiring of integrated circuit and its manufacturing method

Kirchhoff Markus; Rogalli Michael; Wege Stephan

Archive | 2003

Photolithographisches Strukturierungsverfahren mit einer durch ein plasmaunterstützes Abscheideeverfahren hergestellten Kohlenstoff-Hartmaskenschicht diamantartiger Härte

Kirchhoff Markus; Wege Stephan; Stegemann Maik; Vogt Mirko

Archive | 2005

Verfahren zur Bildung eines Kontaktlochs in einer Halbleiterschaltungsanordnung

Kirchhoff Markus; Lahnor Peter; Wege Stephan

Archive | 2001

Verfahren zur Herstellung eines Halbleiterbausteins

Uhlmann Ruediger; Neu Achim; Wege Stephan; Struntz Volker

Archive | 2008

Photolithographisches verfahren zum ausbilden einer struktur in einem halbleitersubstrat

Kirchhoff Markus; Vogt Mirko; Wege Stephan; Katzwinkel Frank

Archive | 2005

Hard mask for anisotropic etching has through openings with greater cross-section in first mask region than in second, transition region arranged between first and second mask regions with continuously reducing opening cross-section

Wege Stephan

Archive | 2005

Verfahren und Vorrichtung zum Überwachen des Ätzvorgangs einer regelmässigen Tiefenstruktur in einem Halbleitersubstrat

Mantz Ulrich; Hingst Thomas; Wege Stephan

Archive | 2004

METHOD FOR FABRICATING ETCHING MASK OF SEMICONDUCTOR STRUCTURE WITH TRENCH CAPACITOR AND ETCHING MASK FABRICATED THEREBY TO VARY DIMENSION OF SIDE SURFACE OF ACTIVE REGION

Moll Peter; Stavrev Momtchil; Vogt Mirko; Wege Stephan

Archive | 2004

Etching gas and process for dry etching

Stegemann Maik; Wege Stephan

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Collaboration

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Kirchhoff Markus

Infineon Technologies

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Rogalli Michael

Infineon Technologies

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Stegemann Maik

Infineon Technologies

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Vogt Mirko

Infineon Technologies

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Schneegans Manfred

Infineon Technologies

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Bewersdorff-Sarlette Ulrike

Infineon Technologies

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Jaeger Wolfgang

Infineon Technologies

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Katzwinkel Frank

Infineon Technologies

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Lahnor Peter

Infineon Technologies

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Stavrev Momtchil

Infineon Technologies

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