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Stephen Jew

Applied Materials

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Publication

Featured researches published by Stephen Jew.

Archive | 2008

Endpoint control of multiple-wafer chemical mechanical polishing

Jimin Zhang; Thomas H. Osterheld; Ingemar Carlsson; Boguslaw A. Swedek; Stephen Jew

Archive | 2010

Temperature control of chemical mechanical polishing

Kun Xu; Jimin Zhang; Stephen Jew; Thomas H. Osterheld

Archive | 2010

Control of overpolishing of multiple substrates on the same platen in chemical mechanical polishing

Jimin Zhang; Ingemar Carlsson; Stephen Jew; Boguslaw A. Swedek

Archive | 2008

USE OF PAD CONDITIONING IN TEMPERATURE CONTROLLED CMP

Kun Xu; Thomas H. Osterheld; Jimin Zhang; Stephen Jew

Archive | 2011

Endpoint control of multiple substrates of varying thickness on the same platen in chemical mechanical polishing

Alain Duboust; Stephen Jew; David H. Mai; Huyen T. Tran; Wen-Chiang Tu; Shih-Haur Shen; Jimin Zhang; Ingemar Carlsson; Boguslaw A. Swedek; Zhihong Wang

Archive | 2011

TUNING OF POLISHING PROCESS IN MULTI-CARRIER HEAD PER PLATEN POLISHING STATION

David H. Mai; Stephen Jew; Xiaoyuan (Sandra) Hu

Archive | 2009

METHOD OF SOFT PAD PREPARATION TO REDUCE REMOVAL RATE RAMP-UP EFFECT AND TO STABILIZE DEFECT RATE

Stephen Jew; Jimin Zhang; Kuo-Lih Chang; Shih-Haur Shen; Wen-Chiang Tu

Archive | 2008

High throughput low topography copper cmp process

David H. Mai; Stephen Jew; Shih-Haur Walters Shen; Zhihong Wang

Archive | 2008

SUBSTRATE HOLDER WITH LIQUID SUPPORTING SURFACE

Hung Chih Chen; Yin Yuan; Stephen Jew

Archive | 2017

ENDPOINT CONTROL OF MULTIPLE SUBSTRATE ZONES OF VARYING THICKNESS IN CHEMICAL MECHANICAL POLISHING

Alain Duboust; Wen-Chiang Tu; Shih-Haur Shen; Jimin Zhang; Ingemar Carlsson; Boguslaw A. Swedek; Zhihong Wang; Stephen Jew; David H. Mai; Huyen T. Tran

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Collaboration

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Jimin Zhang

Applied Materials

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Boguslaw A. Swedek

Applied Materials

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David H. Mai

Applied Materials

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Ingemar Carlsson

Applied Materials

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Shih-Haur Shen

Applied Materials

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Wen-Chiang Tu

Applied Materials

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Zhihong Wang

Applied Materials

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Alain Duboust

Applied Materials

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Huyen T. Tran

Applied Materials

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Thomas H. Osterheld

Applied Materials

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