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Boguslaw A. Swedek

Applied Materials

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Publication

Featured researches published by Boguslaw A. Swedek.

Archive | 2000

Endpoint detection with light beams of different wavelengths

Boguslaw A. Swedek; Andreas Norbert Wiswesser

Archive | 2001

Method and apparatus for detecting an end-point in chemical mechanical polishing of metal layers

Andreas Norbert Wiswesser; Judon Tony Pan; Boguslaw A. Swedek

Archive | 2005

Spectrum based endpointing for chemical mechanical polishing

Dominic J. Benvegnu; Jeffrey Drue David; Boguslaw A. Swedek

Archive | 2001

Combined eddy current sensing and optical monitoring for chemical mechanical polishing

Nils Johansson; Boguslaw A. Swedek; Manoocher Birang

Archive | 2004

Method for monitoring a substrate during chemical mechanical polishing

Andreas Norbert Wiswesser; Walter Schoenleber; Boguslaw A. Swedek

Archive | 2002

Integrated endpoint detection system with optical and eddy current monitoring

Boguslaw A. Swedek; Manoocher Birang; Nils Johansson

Archive | 2007

Substrate thickness measuring during polishing

Jeffrey Drue David; Dominic J. Benvegnu; Harry Q. Lee; Boguslaw A. Swedek; Lakshmanan Karuppiah

Archive | 2001

Method and apparatus for optical monitoring in chemical mechanical polishing

Andreas Norbert Wiswesser; Judon Tony Pan; Boguslaw A. Swedek; Manoocher Birang

Archive | 2006

Polishing system with in-line and in-situ metrology

Boguslaw A. Swedek; Bret W. Adams; Sanjay Rajaram; David A. Chan; Manoocher Birang

Archive | 2008

Using spectra to determine polishing endpoints

Harry Q. Lee; Boguslaw A. Swedek; Dominic J. Benvegnu; Jeffrey Drue David

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Collaboration

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Dominic J. Benvegnu

Applied Materials

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Jeffrey Drue David

Applied Materials

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Manoocher Birang

Applied Materials

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Harry Q. Lee

Applied Materials

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Wen-Chiang Tu

Applied Materials

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Ingemar Carlsson

Applied Materials

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Nils Johansson

Applied Materials

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Andreas Norbert Wiswesser

Applied Materials

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Lakshmanan Karuppiah

Applied Materials

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Doyle E. Bennett

Applied Materials

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