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Dive into the research topics where Shih-Haur Shen is active.

Publication


Featured researches published by Shih-Haur Shen.


Archive | 2011

Endpoint control of multiple substrates of varying thickness on the same platen in chemical mechanical polishing

Alain Duboust; Stephen Jew; David H. Mai; Huyen T. Tran; Wen-Chiang Tu; Shih-Haur Shen; Jimin Zhang; Ingemar Carlsson; Boguslaw A. Swedek; Zhihong Wang


Archive | 2011

High sensitivity eddy current monitoring system

Hassan G. Iravani; Kun Xu; Boguslaw A. Swedek; Ingemar Carlsson; Shih-Haur Shen; Wen-Chiang Tu


Archive | 2009

METHOD OF SOFT PAD PREPARATION TO REDUCE REMOVAL RATE RAMP-UP EFFECT AND TO STABILIZE DEFECT RATE

Stephen Jew; Jimin Zhang; Kuo-Lih Chang; Shih-Haur Shen; Wen-Chiang Tu


Archive | 2013

Feedback control using detection of clearance and adjustment for uniform topography

Kun Xu; Ingemar Carlsson; Tzu-Yu Liu; Shih-Haur Shen; Boguslaw A. Swedek; Wen-Chiang Tu; Lakshmanan Karuppiah


Archive | 2011

Eddy current monitoring of metal features

Hassan G. Iravani; Kun Xu; Boguslaw A. Swedek; Ingemar Carlsson; Shih-Haur Shen; Wen-Chiang Tu; David Maxwell Gage


ECS Journal of Solid State Science and Technology | 2016

Impact of Film Morphology on Chemical Mechanical Polishing of Tungsten

Kun Xu; Shih-Haur Shen; Jason Garcheung Fung; Hassan G. Iravani; Ingemar Carlsson; Tzu-Yu Liu; Bogdan Swedek; Shou-sung Chang; Wen-chiang Tu; Tomohiko Kitajima; Katrina Mikhaylich; Brian J. Brown; Sidney P. Huey; Fritz Redeker


Archive | 2013

DETERMINATION OF GAIN FOR EDDY CURRENT SENSOR

Kun Xu; Shih-Haur Shen; Boguslaw A. Swedek; Ingemar Carlsson; Doyle E. Bennett; Wen-Chiang Tu; Hassan G. Iravani; Tzu-Yu Liu


Archive | 2012

EDDY CURRENT MONITORING OF METAL RESIDUE OR METAL PILLARS

Hassan G. Iravani; Kun Xu; Boguslaw A. Swedek; Ingemar Carlsson; Shih-Haur Shen; Wen-Chiang Tu; David Maxwell Gage; James C. Wang


Archive | 2015

Adjusting eddy current measurements

Kun Xu; Ingemar Carlsson; Boguslaw A. Swedek; Doyle E. Bennett; Shih-Haur Shen; Hassan G. Iravani; Wen-Chiang Tu; Tzu-Yu Liu


Archive | 2013

In-situ monitoring system with monitoring of elongated region

Kun Xu; Shih-Haur Shen; Tzu-Yu Liu; Ingemar Carlsson; Hassan G. Iravani; Boguslaw A. Swedek; Wen-Chiang Tu; Doyle E. Bennett

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