Shih-Haur Shen | Researchain

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Featured researches published by Shih-Haur Shen.

Archive | 2011

Endpoint control of multiple substrates of varying thickness on the same platen in chemical mechanical polishing

Alain Duboust; Stephen Jew; David H. Mai; Huyen T. Tran; Wen-Chiang Tu; Shih-Haur Shen; Jimin Zhang; Ingemar Carlsson; Boguslaw A. Swedek; Zhihong Wang

Archive | 2011

High sensitivity eddy current monitoring system

Hassan G. Iravani; Kun Xu; Boguslaw A. Swedek; Ingemar Carlsson; Shih-Haur Shen; Wen-Chiang Tu

Archive | 2009

METHOD OF SOFT PAD PREPARATION TO REDUCE REMOVAL RATE RAMP-UP EFFECT AND TO STABILIZE DEFECT RATE

Stephen Jew; Jimin Zhang; Kuo-Lih Chang; Shih-Haur Shen; Wen-Chiang Tu

Archive | 2013

Feedback control using detection of clearance and adjustment for uniform topography

Kun Xu; Ingemar Carlsson; Tzu-Yu Liu; Shih-Haur Shen; Boguslaw A. Swedek; Wen-Chiang Tu; Lakshmanan Karuppiah

Archive | 2011

Eddy current monitoring of metal features

Hassan G. Iravani; Kun Xu; Boguslaw A. Swedek; Ingemar Carlsson; Shih-Haur Shen; Wen-Chiang Tu; David Maxwell Gage

ECS Journal of Solid State Science and Technology | 2016

Impact of Film Morphology on Chemical Mechanical Polishing of Tungsten

Kun Xu; Shih-Haur Shen; Jason Garcheung Fung; Hassan G. Iravani; Ingemar Carlsson; Tzu-Yu Liu; Bogdan Swedek; Shou-sung Chang; Wen-chiang Tu; Tomohiko Kitajima; Katrina Mikhaylich; Brian J. Brown; Sidney P. Huey; Fritz Redeker

Archive | 2013