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Susanne Beder

Carl Zeiss AG

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Publication

Featured researches published by Susanne Beder.

Archive | 2008

Projection objective having a high aperture and a planar end surface

Susanne Beder; Wolfgang Singer; Karl-Heinz Schuster

Archive | 2005

Projection objective for a microlithographic projection exposure apparatus

Bernhard Kneer; Norbert Wabra; Toralf Gruner; Alexander Epple; Susanne Beder; Wolfgang Singer

Archive | 2004

Objectives as a microlithography projection objective with at least one liquid lens

David Shafer; Susanne Beder; Karl-Heinz Schuster; Wolfgang Singer

Archive | 2004

Method of manufacturing an optical element

Ralf Arnold; Bernd Dörband; Frank Schillke; Susanne Beder

Archive | 2005

Projection lens system of a microlithographic projection exposure installation

Helmut Beierl; Sascha Bleidistel; Wolfgang Singer; Toralf Gruner; Alexander Epple; Norbert Wabra; Susanne Beder; Jochen Weber; Heiko Feldmann; Baerbel Schwaer; Olaf Rogalsky; Arif Kazi

Archive | 2005

Arrangement of optical elements in a microlithographic projection exposure apparatus

Michael Totzeck; Gerhart Fuerter; Olaf Dittmann; Karl-Heinz Schuster; David Shafer; Susanne Beder

Archive | 2005

Projection optical system and method

David Shafer; Susanne Beder

Archive | 2006

Optical system of a microlithographic exposure system

Michael Totzeck; Susanne Beder; Wilfried Clauss; Heiko Feldmann; Daniel Krähmer; Aurelian Dodoc

Archive | 2006

Hologram and Method of Manufacturing an Optical Element Using a Hologram

Jochen Hetzler; Susanne Beder; Heiko Feldmann

Archive | 2005

Method of calibrating an interferometer and method of manufacturing an optical element

Rolf Freimann; Bernd Doerband; Frank Schillke; Susanne Beder; Stefan Schulte

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Collaboration

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Heiko Feldmann

Carl Zeiss AG

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Wolfgang Singer

Carl Zeiss AG

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Alexander Epple

Carl Zeiss AG

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Toralf Gruner

Carl Zeiss AG

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Aurelian Dodoc

Carl Zeiss AG

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Frank Schillke

Carl Zeiss AG

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David Shafer

Carl Zeiss AG

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Norbert Wabra

Carl Zeiss AG

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Bernhard Kneer

Carl Zeiss AG

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Karl-Heinz Schuster

Carl Zeiss AG

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