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Taira Takase

Tokyo Electron

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Publication

Featured researches published by Taira Takase.

Archive | 2004

Method and apparatus for an improved optical window deposition shield in a plasma processing system

Kouji Mitsuhashi; Hidehito Saigusa; Taira Takase; Hiroyuki Nakayama

Archive | 2002

Method and apparatus for an improved upper electrode plate in a plasma processing system

Hidehito Saigusa; Taira Takase; Kouji Mitsuhashi; Hiroyuki Nakayama

Archive | 2002

Method and apparatus for an improved deposition shield in a plasma processing system

Hidehito Saigusa; Taira Takase; Kouji Mitsuhashi; Hiroyuki Nakayama

Archive | 2007

Method and apparatus for an improved bellows shield in a plasma processing system

Hidehito Saigusa; Taira Takase; Kouji Mitsuhashi; Hiroyuki Nakayama

Archive | 2014

MOUNTING TABLE AND PLASMA PROCESSING APPARATUS

Kyouhei Yamamoto; Taira Takase

Archive | 2003

Method of cleaning a plasma processing apparatus

Taira Takase; Nobuyuki Nagayama; Kouji Mitsuhashi; Hiroyuki Nakayama

Archive | 2006

Apparatus for an improved deposition shield in a plasma processing system

Hidehito Saigusa; Taira Takase; Kouji Mitsuhashi; Hiroyuki Nakayama

Archive | 2005

Optical window deposition shield for use in a plasma processing system

Kouji Mitsuhashi; Hidehito Saigusa; Taira Takase; Hiroyuki Nakayama

Archive | 2005

Plasma processing apparatus, control method thereof and program for performing same

Satoshi Yamazaki; Taira Takase

Archive | 2003

Method for cleaning plasma processing device

Taira Takase; Nobuyuki Nagayama; Kouji Mitsuhashi; Hiroyuki Nakayama

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Collaboration

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Hiroyuki Nakayama

Mitsubishi

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Kouji Mitsuhashi

Tokyo Electron

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Hidehito Saigusa

Tokyo Electron

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Nobuyuki Nagayama

Tokyo Electron

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Kyouhei Yamamoto

Tokyo Electron

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Satoshi Yamazaki

Tokyo Electron

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