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Hidehito Saigusa

Tokyo Electron

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Publication

Featured researches published by Hidehito Saigusa.

Archive | 2004

Method and apparatus for an improved optical window deposition shield in a plasma processing system

Kouji Mitsuhashi; Hidehito Saigusa; Taira Takase; Hiroyuki Nakayama

Archive | 2002

Method and apparatus for an improved upper electrode plate in a plasma processing system

Hidehito Saigusa; Taira Takase; Kouji Mitsuhashi; Hiroyuki Nakayama

Archive | 2002

Method and apparatus for an improved deposition shield in a plasma processing system

Hidehito Saigusa; Taira Takase; Kouji Mitsuhashi; Hiroyuki Nakayama

Archive | 2007

Method and apparatus for an improved bellows shield in a plasma processing system

Hidehito Saigusa; Taira Takase; Kouji Mitsuhashi; Hiroyuki Nakayama

Archive | 1998

Elecrode unit and processor

Nobuyuki Okayama; Hidehito Saigusa; Jun Ozawa; Daisuke Hayashi; Naoki Takayama; Koichi Kazama

Archive | 2006

Apparatus for an improved deposition shield in a plasma processing system

Hidehito Saigusa; Taira Takase; Kouji Mitsuhashi; Hiroyuki Nakayama

Archive | 2005

Optical window deposition shield for use in a plasma processing system

Kouji Mitsuhashi; Hidehito Saigusa; Taira Takase; Hiroyuki Nakayama

Archive | 2003

Procede et appareil destines a une protection de depot amelioree dans un systeme de traitement au plasma

Hidehito Saigusa; Taira Takase; Kouji Mitsuhashi; Hiroyuki Nakayama

Archive | 2003

Procede et dispositif associes au blindage antidepot ameliore d'une fenetre optique dans un systeme de traitement par plasma

Kouji Mitsuhashi; Hiroyuki Nakayama; Hidehito Saigusa; Taira Takase

Archive | 2003

Procede et appareil destines a une plaque d'une electrode superieure amelioree dans un systeme de traitement au plasma

Kouji Mitsuhashi; Hiroyuki Nakayama; Hidehito Saigusa; Taira Takase

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Hiroyuki Nakayama

Mitsubishi

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Kouji Mitsuhashi

Tokyo Electron

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Taira Takase

Tokyo Electron

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Daisuke Hayashi

Tokyo Electron

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Jun Ozawa

Tokyo Electron

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Koichi Kazama

Tokyo Electron

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Naoki Takayama

Tokyo Electron

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Nobuyuki Okayama

Tokyo Electron

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