Is this you? Create Your Porfile
Avatar

Jun Ozawa

Tokyo Electron

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Jun Ozawa is active.

Explore More

Publication

Featured researches published by Jun Ozawa.

Archive | 2000

Vacuum treatment device

Jun Ozawa; Jun Hirose; Eiji Hirose; Hiroshi Koizumi

Archive | 2006

Vacuum process system

Jun Ozawa; Jun Hirose; Masaki Narushima

Archive | 2010

Substrate processing apparatus, program for performing operation and control method thereof, and computer readable storage medium storing the program

Tomoyuki Kudo; Jun Ozawa; Hiroshi Nakamura; Kazunori Kazama; Tsuyoshi Moriya; Hiroyuki Nakayama; Hiroshi Nagaike

Archive | 2009

Processed object processing apparatus, processed object processing method, pressure control method, processed object transfer method, and transfer apparatus

Jun Ozawa; Gaku Takahashi

Archive | 1999

Transfer system for vacuum process equipment

Jun Ozawa; Jun Hirose; Eiji Hirose; Makoto Ohara

Archive | 2010

SUBSTRATE POSITION ALIGNMENT MECHANISM, VACUUM PRECHAMBER AND SUBSTRATE PROCESSING SYSTEM HAVING SAME

Jun Ozawa; Hajime Kumasaka

Archive | 2009

Substrate position alignment mechanism; and vacuum pre-chamber and substrate processing system using the same

Hajime Kumasaka; Jun Ozawa; 潤 小澤; 肇 熊坂

Archive | 1998

Elecrode unit and processor

Nobuyuki Okayama; Hidehito Saigusa; Jun Ozawa; Daisuke Hayashi; Naoki Takayama; Koichi Kazama

Archive | 2010

Substrate position alignment mechanism

Jun Ozawa; Hajime Kumasaka

Archive | 2004

Bearbeitungsgegenstands-Bearbeitungseinrichtung, Bearbeitungssgegenstands-Bearbeitungsverfahren, Drucksteuerverfahren, Bearbeitungsgegenstands-Transportverfahren, und Transporteinrichtung

Jun Ozawa; Gaku Takahashi

Explore More

Collaboration

Dive into the Jun Ozawa's collaboration.

Top Co-Authors
Avatar

Jun Hirose

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Gaku Takahashi

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Eiji Hirose

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Hajime Kumasaka

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Nobuyuki Okayama

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Daisuke Hayashi

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Hidehito Saigusa

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Hiroshi Koizumi

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Koichi Kazama

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Masaki Narushima

Tokyo Electron

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge