Takafumi Sakurada
Hitachi
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Publication
Featured researches published by Takafumi Sakurada.
MRS Proceedings | 2007
Jin Amanokura; Katsumi Mabuchi; Takafumi Sakurada; Yutaka Nomura; Masanobu Habiro; Haruo Akahoshi
In order to reduce microscratches and obtain minimized dishing and erosion, we have developed new abrasive-free Cu CMP slurries. During the development of these slurries, some electrochemical examination was performed. The most effective knowledge was obtained through the analysis using rotary Cu disk electrode under pressure. On the basis of these studies, new abrasive-free Cu CMP slurries with a high removal rate and excellent planarity were designed and developed. The mechanism of reducing dishing and erosion was also discussed.
Archive | 2011
Kouji Mishima; Takafumi Sakurada; Tomokazu Shimada
Archive | 2007
Takashi Shinoda; Shigeru Nobe; Takafumi Sakurada; Yoshikazu Oomori; Tadahiro Kimura
Archive | 2006
Takashi Shinoda; Shigeru Nobe; Takafumi Sakurada; Yoshikazu Oomori; Tadahiro Kimura
Archive | 2006
Yutaka Nomura; Hiroshi Nakagawa; Sou Anzai; Fumiko Tobita; Takafumi Sakurada; Katsumi Mabuchi
Archive | 2013
Takaaki Tanaka; Masato Fukasawa; Shigeru Nobe; Takafumi Sakurada; Takashi Shinoda
Archive | 2007
Shigeru Nobe; Takashi Shinoda; Takafumi Sakurada; Takaaki Tanaka; Yoshikazu Oomori; Tadahiro Kimura; Masato Fukasawa
Archive | 2007
Takafumi Sakurada; Daisuke Hosaka; Kanshi Chinone
Archive | 2007
Takafumi Sakurada; Daisuke Hosaka; Kanshi Chinone
Archive | 2006
Katsumi Mabuchi; Haruo Akahoshi; Masanobu Habiro; Takafumi Sakurada; Yutaka Nomura
