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Masato Fukasawa

Hitachi

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Publication

Featured researches published by Masato Fukasawa.

Archive | 2005

Cmp polishing agent and method for polishing substrate

Masato Fukasawa; Naoyuki Hitachi Chemical Co. Ltd. Koyama; Yasushi Kurata; Kouji Hitachi Chemical Co. Ltd. Haga; Toshiaki Akutsu; Yuuto Ootsuki

Archive | 2004

Cmp polishing compound and polishing method

Masato Fukasawa; Masato Yoshida; Naoyuki Koyama; Yuto Ootsuki; Chiaki Yamagishi; Kazuhiro Enomoto; Kouji Haga; Yasushi Kurata

Archive | 2005

CMP polishing slurry and method of polishing substrate

Masato Fukasawa; Naoyuki Koyama; Kouji Haga; Toshiaki Akutsu

Archive | 2008

Polishing liquid for metal and method of polishing

Yutaka Nomura; Masato Fukasawa; Hiroshi Nakagawa

Archive | 1989

Dry toner, dry developer and process for forming electrophotographic images

Yuugo Kumagai; Ryouji Tan; Takashi Ikeda; Tetsuya Fujii; Chiaki Okada; Osamu Higashida; Hatuo Sugitani; Masato Fukasawa

Archive | 2006

Polishing slurry for silicon oxide, additive liquid and polishing method

Masaya Nishiyama; Kazuhiro Enomoto; Masato Fukasawa; Toshiaki Akutsu; Yuuto Otsuki; Toranosuke Ashizawa

Archive | 2008

Polishing liquid for metal film and polishing method

Kouji Haga; Masato Fukasawa; Jin Amanokura; Hiroshi Nakagawa

Archive | 2007

CMP Abrasive Slurry for Polishing Insulation Film, Polishing Method, and Semiconductor Electronic Part Polished by the Polishing Method

Masato Fukasawa; Kazuhiro Enomoto; Chiaki Yamagishi; Naoyuki Koyama

Archive | 2004

Hazardous substance decomposer and process for producing the same

Naoyuki Koyama; Youichi Machii; Masato Yoshida; Masato Fukasawa; Toranosuke Ashizawa

Archive | 2011

Polishing solution for CMP and polishing method using the polishing solution

Eiichi Satou; Munehiro Oota; Kanshi Chinone; Shigeru Nobe; Kazuhiro Enomoto; Tadahiro Kimura; Masato Fukasawa; Masanobu Habiro; Yousuke Hoshi

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Collaboration

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Toshiaki Akutsu

Hitachi

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Kazuhiro Enomoto

Hitachi

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Kouji Haga

Hitachi

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Hiroshi Nakagawa

Hitachi

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Shigeru Nobe

Hitachi

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Tadahiro Kimura

Hitachi

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Takafumi Sakurada

Hitachi

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Toranosuke Ashizawa

Hitachi

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Chiaki Yamagishi

Hitachi

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Takaaki Tanaka

Hitachi

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