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Takeda Takanobu

Shin-Etsu Chemical

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Publication

Featured researches published by Takeda Takanobu.

Archive | 2011

Styrene polymer, chemically amplified positive resist composition and patterning process

Osamu Watanabe; Shimada Junji; Takeda Takanobu

Archive | 2004

Resist material and method for pattern formation

Takeda Takanobu; Watanabe Osamu

Archive | 2007

Polymer and positive type resist material and method for forming pattern using the same

Hatakeyama Jun; Kanou Takeshi; Takeda Takanobu

Archive | 2004

POLYMER COMPOUND, POSITIVE RESIST MATERIAL, AND METHOD FOR FORMING PATTERN USING THE RESIST MATERIAL

Hatakeyama Jun; Kanou Takeshi; Hasegawa Koji; Watanabe Takeshi; Watanabe Osamu; Takeda Takanobu

Archive | 2001

CHEMICAL AMPLIFICATION TYPE RESIST MATERIAL

Takeda Takanobu; Watanabe Osamu; Watanabe Atsushi; Hatakeyama Jun; Nishi Tsunehiro; Kanou Takeshi

Archive | 2002

PRODUCTION METHOD FOR POLYMER COMPOUND AND RESIST MATERIAL PREPARED BY USING THE POLYMER COMPOUND

Takeda Takanobu; Watanabe Osamu

Archive | 1999

POLYSTYRENE-BASED POLYMER COMPOUND, CHEMICAL AMPLIFICATION POSITIVE TYPE RESIST MATERIAL AND PATTERN FORMATION

Watanabe Osamu; Shimada Junji; Takeda Takanobu

Archive | 2002

SILICON-CONTAINING POLYMER COMPOUND, RESIST MATERIAL AND PATTERN FORMATION METHOD

Hatakeyama Jun; Ishihara Toshinobu; Kubota Tohru; Kubota Yasufumi; Takeda Takanobu

Archive | 2002

SILICONE-CONTAINING POLYMER COMPOUND, RESIST MATERIAL AND METHOD FOE FORMING PATTERN

Takeda Takanobu; Hatakeyama Jun; Ishihara Toshinobu; Kubota Toru; Kubota Yasubumi

Archive | 2001

CHEMICAL AMPLIFICATION TYPE POSITIVE RESIST MATERIAL AND METHOD FOR FORMING PATTERN

Takeda Takanobu; Watanabe Atsushi; Takemura Katsuya; Koizumi Kenji

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Collaboration

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Watanabe Osamu

Shin-Etsu Chemical

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Hatakeyama Jun

Shin-Etsu Chemical

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Ishihara Toshinobu

Shin-Etsu Chemical

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Shimizu Takaaki

Shin-Etsu Chemical

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Watanabe Jun

Shin-Etsu Chemical

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Kobayashi Tomohiro

Shin-Etsu Chemical

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Masunaga Keiichi

Shin-Etsu Chemical

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Shimada Junji

Shin-Etsu Chemical

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Watanabe Satoshi

Shin-Etsu Chemical

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Asakura Kazuyuki

Shin-Etsu Chemical

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