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Kobayashi Tomohiro

Shin-Etsu Chemical

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Publication

Featured researches published by Kobayashi Tomohiro.

Archive | 2009

Sulfonium salt, resist material and method for forming pattern

Sagehashi Masayoshi; Osawa Yoichi; Hasegawa Koji; Kanao Go; Kobayashi Tomohiro

Archive | 2006

RINSING SOLUTION AND METHOD FOR FORMING RESIST PATTERN USING SAME

Watanabe Satoshi; Kobayashi Tomohiro; Kawai Yoshio; Ishihara Toshinobu

Archive | 2012

NITROGEN-CONTAINING MONOMER, POLYMER, RESIST MATERIAL, AND PATTERNING PROCESS

Sagehashi Masayoshi; Hatakeyama Jun; Watanabe Takeshi; Kobayashi Tomohiro

Archive | 2012

FLUOROALCOHOL COMPOUND, FLUORINATED MONOMER, POLYMER COMPOUND, RESIST MATERIAL AND PATTERNING PROCESS

Hasegawa Koji; Watanabe Takeshi; Kobayashi Tomohiro; Kanao Go

Archive | 2013

Photoacid generator, chemically amplified resist material, and patterning process

Ohashi Masaki; Kobayashi Tomohiro; Sagehashi Masayoshi

Archive | 2012

RESIST COMPOSITION AND PATTERNING METHOD USING THE SAME

Nagasawa Takayuki; Kobayashi Tomohiro; Taniguchi Ryosuke; Ohashi Masaki

Archive | 2011

ACID-CLEAVABLE ESTER MONOMER HAVING SPIRO RING STRUCTURE, POLYMER COMPOUND, RESIST MATERIAL AND PATTERN-FORMING METHOD

Kanao Go; Kobayashi Tomohiro; Sagehashi Masayoshi; Watanabe Takeshi; Hasegawa Koji; Tachibana Seiichiro

Archive | 2003

OPTICAL ACID-GENERATING AGENT, CHEMICAL AMPLIFICATION RESIST MATERIAL, AND METHOD FOR FORMING PATTERN

Kobayashi Tomohiro; Watanabe Satoshi; Nishi Tsunehiro; Osawa Yoichi; Kobayashi Katsuhiro

Archive | 2013

METHOD FOR FORMING NEGATIVE PATTERN AND NEGATIVE RESIST COMPOSITION

Kobayashi Tomohiro; Katayama Kazuhiro; Hatakeyama Jun; Suga Yuki; Hasegawa Koji

Archive | 2012

POLYMER COMPOUND, POSITIVE-TYPE RESIST MATERIAL, AND METHOD FOR FORMING PATTERN

Kobayashi Tomohiro; Nagasawa Kenko; Taniguchi Ryosuke; Osawa Yoichi; Funatsu Akiyuki; Tachibana Seiichiro

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Collaboration

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Sagehashi Masayoshi

Shin-Etsu Chemical

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Hasegawa Koji

Shin-Etsu Chemical

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Hatakeyama Jun

Shin-Etsu Chemical

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Ishihara Toshinobu

Shin-Etsu Chemical

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Ohashi Masaki

Shin-Etsu Chemical

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Tachibana Seiichiro

Shin-Etsu Chemical

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Nishi Tsunehiro

Shin-Etsu Chemical

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Takeda Takanobu

Shin-Etsu Chemical

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Watanabe Osamu

Shin-Etsu Chemical

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Katayama Kazuhiro

Shin-Etsu Chemical

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