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Masunaga Keiichi

Shin-Etsu Chemical

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Publication

Featured researches published by Masunaga Keiichi.

Archive | 2012

POLYMER COMPOUND, CHEMICALLY AMPLIFIED NEGATIVE RESIST COMPOSITION, AND METHOD FOR FORMING PATTERN

Masunaga Keiichi; Watanabe Satoshi; Tanaka Haruyori

Archive | 2011

CHEMICALLY-AMPLIFIED RESIST MATERIAL AND PATTERN FORMING METHOD

Masunaga Keiichi; Watanabe Satoshi; Tanaka Haruyori; Domon Hiromasa

Archive | 2011

CHEMICALLY AMPLIFIED NEGATIVE RESIST COMPOSITION FOR ELECTRON BEAM OR FOR EUV AND PATTERNING PROCESS

Masunaga Keiichi; Watanabe Satoshi; Tanaka Haruyori; Domon Hiromasa

Archive | 2014

CONDUCTIVE POLYMER COMPOSITION, COATED ARTICLE PROVIDED WITH ANTISTATIC FILM OBTAINED FROM THE COMPOSITION, AND PATTERN FORMING METHOD USING THE COMPOSITION

Sawai Toshiya; Nagasawa Takayuki; Watanabe Satoshi; Masunaga Keiichi

Archive | 2008

METHOD FOR PREPARING CHEMICALLY AMPLIFIED RESIST COMPOSITION

Masunaga Keiichi; Takeda Takanobu; Watanabe Tamotsu; Watanabe Satoshi; Koitabashi Ryuji; Watanabe Osamu

Archive | 2011

NEGATIVE RESIST COMPOSITION AND PATTERNING METHOD

Tanaka Haruyori; Masunaga Keiichi; Domon Hiromasa; Watanabe Satoshi

Archive | 2013

CHEMICALLY AMPLIFIED NEGATIVE RESIST COMPOSITION

Takeda Takanobu; Watanabe Tamotsu; Koitabashi Ryuji; Masunaga Keiichi; Tanaka Akinobu; Watanabe Osamu

Archive | 2010

RESIST PATTERNING PROCESS AND METHOD OF MANUFACTURING PHOTOMASK

Takeda Takanobu; Watanabe Satoshi; Watanabe Tamotsu; Tanaka Haruyori; Masunaga Keiichi; Koitabashi Ryuji

Archive | 2012

PHOTOMASK BLANK AND PROCESSING METHOD FOR THE SAME

Watanabe Satoshi; Masunaga Keiichi; Kaneko Hideo; Igarashi Shinichi

Archive | 2010

NEGATIVE RESIST COMPOSITION, PATTERN FORMING METHOD, AND INSPECTION METHOD AND PREPARING METHOD OF THE SAME

Tanaka Haruyori; Masunaga Keiichi; Domon Hiromasa; Watanabe Satoshi

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Collaboration

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Watanabe Satoshi

Shin-Etsu Chemical

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Domon Daisuke

Shin-Etsu Chemical

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Kotake Masaaki

Shin-Etsu Chemical

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Kaneko Hideo

Shin-Etsu Chemical

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Takeda Takanobu

Shin-Etsu Chemical

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Inazuki Yukio

Shin-Etsu Chemical

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Ohashi Masaki

Shin-Etsu Chemical

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Watanabe Osamu

Shin-Etsu Chemical

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Yamada Kenji

Shin-Etsu Chemical

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