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Takehiko Fujita

Tokyo Electron

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Publication

Featured researches published by Takehiko Fujita.

Archive | 2007

Film formation method and apparatus for forming silicon oxide film

Kazuhide Hasebe; Yoshihiro Ishida; Takehiko Fujita; Jun Ogawa; Shigeru Nakajima

Archive | 2002

System and method for performing semiconductor processing on substrate being processed

Koichi Sakamoto; Yamato Tonegawa; Takehiko Fujita

Archive | 2007

Oxidation method and apparatus for semiconductor process

Takehiko Fujita; Jun Ogawa; Shigeru Nakajima; Kazuhide Hasebe

Archive | 2006

Method for using film formation apparatus

Naotaka Noro; Yamato Tonegawa; Takehiko Fujita; Norifumi Kimura

Archive | 2007

Oxidation apparatus and method for semiconductor process

Kazuhide Hasebe; Takehiko Fujita; Shigeru Nakajima; Jun Ogawa

Archive | 2005

Reduction in size of hemispherical grains of hemispherical grained film

Kazuhide Hasebe; Norifumi Kimura; Takehiko Fujita; Yoshikazu Furusawa

Archive | 2004

Heat-processing method and apparatus for semiconductor process

Takehiko Fujita; Akitake Tamura; Keisuke Suzuki; Kazuhide Hasebe; Mitsuhiro Okada

Archive | 2008

VERTICAL CVD APPPARATUS FOR FORMING SILICON-GERMANIUM FILM

Masaki Kurokawa; Katsuhiko Komori; Norifumi Kimura; Kazuhide Hasebe; Takehiko Fujita; Akitake Tamura; Yoshikazu Furusawa

Archive | 2003

Heat treating system and heat treating method

Takehiko Fujita; Mitsuhiro Okada; Kota Umezawa; Kazuhide Hasebe; Koichi Sakamoto

Archive | 2006

METHOD AND DEVICE FOR FORMING OXIDE FILM, AND PROGRAM

Takehiko Fujita; Kazuhide Hasebe; Yoshihiro Ishida; Shigeru Nakajima; Atsushi Ogawa; 滋 中島; 淳 小川; 義弘 石田; 武彦 藤田; 一秀 長谷部

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Collaboration

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Kazuhide Hasebe

Tokyo Electron

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Shigeru Nakajima

Tokyo Electron

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Jun Ogawa

Tokyo Electron

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Koichi Sakamoto

Tokyo Electron

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Yamato Tonegawa

Tokyo Electron

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Norifumi Kimura

Tokyo Electron

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Mitsuhiro Okada

Tokyo Electron

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Yoshihiro Ishida

Tokyo Electron

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Yoshikazu Furusawa

Tokyo Electron

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Katsuhiko Komori

Tokyo Electron

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