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Talex Sajoto

Applied Materials

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Publication

Featured researches published by Talex Sajoto.

Archive | 1998

High temperature multi-layered alloy heater assembly and related methods

Talex Sajoto; Leonid Selyutin; Jun Zhao; Stefan Wolff

Archive | 1996

Thermally floating pedestal collar in a chemical vapor deposition chamber

Jun Zhao; Ashok K. Sinha; Avi Tepman; Mei Chang; Lee Luo; Alex Schreiber; Talex Sajoto; Stefan Wolff; Charles Dornfest; Michal Danek

Archive | 1996

Self aligning lift mechanism

Leonid Selyutin; Talex Sajoto; Jun Zhao

Archive | 1998

Vaporization and deposition apparatus and process

Sasson Somekh; Jun Zhao; Charles Dornfest; Talex Sajoto; Leonid Selyutin; Vincent Ku; Chris Wang; Frank Chang; Po Tang

Archive | 1998

Heater for use in substrate processing apparatus to deposit tungsten

Jun Zhao; Talex Sajoto; Leonid Selyutin

Archive | 2000

Temperature controlled gas feedthrough

Talex Sajoto; Charles Dornfest; Leonid Selyutin; Jun Zhao; Vincent Ku; Xiao Liang Jin

Archive | 1997

Methods and apparatus for a cleaning process in a high temperature, corrosive, plasma environment

Jun Zhao; Lee Luo; Jia-Xiang Wang; Xiao Liang Jin; Stefan Wolff; Talex Sajoto; Mei Chang; Paul Smith

Archive | 1997

High temperature, high flow rate chemical vapor deposition apparatus and related methods

Jun Zhao; Lee Luo; Xiao Liang Jin; Jia-Xiang Wang; Talex Sajoto; Stefan Wolff; Leonid Selyutin; Ashok K. Sinha

Archive | 1997

High temperature, high deposition rate process and apparatus for depositing titanium layers

Jun Zhao; Lee Luo; Xiao Liang Jin; Jia-Xiang Wang; Stefan Wolff; Talex Sajoto

Archive | 1999

Apparatus for substrate processing with improved throughput and yield

Jun Zhao; Ashok K. Sinha; Avi Tepman; Mei Chang; Lee Luo; Alex Schreiber; Talex Sajoto; Stefan Wolff; Charles Dornfest; Michal Danek

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Jun Zhao

Applied Materials

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Charles Dornfest

Applied Materials

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Stefan Wolff

Applied Materials

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Leonid Selyutin

Applied Materials

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Lee Luo

Applied Materials

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Mei Chang

Applied Materials

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Ashok K. Sinha

Applied Materials

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Jia-Xiang Wang

Applied Materials

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Avi Tepman

Applied Materials

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Vincent Ku

Applied Materials

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