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Vincent Ku

Applied Materials

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Publication

Featured researches published by Vincent Ku.

Archive | 2001

Gas delivery apparatus and method for atomic layer deposition

Ling Chen; Vincent Ku; Dien-Yeh Wu; Hua Chung; Alan Ouye; Norman Nakashima

Archive | 2002

Gas delivery apparatus for atomic layer deposition

Ling Chen; Vincent Ku; Dien-Yeh Wu; Hua Chung; Alan Ouye; Norman Nakashima; Mei Chang

Archive | 2003

Method and apparatus for providing gas to a processing chamber

Seshadri Ganguli; Ling Chen; Vincent Ku

Archive | 2002

Method of film deposition using activated precursor gases

Hua Chung; Ling Chen; Vincent Ku

Archive | 2005

Method and apparatus of generating PDMAT precursor

Ling Chen; Vincent Ku; Hua Chung; Christophe Marcadal; Seshadri Ganguli; Jenny Lin; Dien-Yeh Wu; Alan Ouye; Mei Chang

Archive | 2002

Method and apparatus for monitoring solid precursor delivery

Seshadri Ganguli; Vincent Ku; Hua Chung; Ling Chen

Archive | 2003

Sequential deposition of tantalum nitride using a tantalum-containing precursor and a nitrogen-containing precursor

Wei Cao; Hua Chung; Vincent Ku; Ling Chen

Archive | 1998

Vaporization and deposition apparatus and process

Sasson Somekh; Jun Zhao; Charles Dornfest; Talex Sajoto; Leonid Selyutin; Vincent Ku; Chris Wang; Frank Chang; Po Tang

Archive | 2002

Method and apparatus for gas temperature control in a semiconductor processing system

Vincent Ku; Ling Chen; Dien-Yeh Wu; Alan Ouye; Irena Wysok

Archive | 2000

Temperature controlled gas feedthrough

Talex Sajoto; Charles Dornfest; Leonid Selyutin; Jun Zhao; Vincent Ku; Xiao Liang Jin

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Collaboration

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Ling Chen

Applied Materials

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Hua Chung

Applied Materials

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Dien-Yeh Wu

Applied Materials

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Alan Ouye

Applied Materials

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Mei Chang

Applied Materials

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Seshadri Ganguli

Applied Materials

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Charles Dornfest

Applied Materials

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Jun Zhao

Applied Materials

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Norman Nakashima

Applied Materials

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Talex Sajoto

Applied Materials

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