Tatsuhiro Yabune
Tohoku University
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Publication
Featured researches published by Tatsuhiro Yabune.
Japanese Journal of Applied Physics | 1996
Rochdi Messoussi; Steven Verhaverbeke; Tatsuhiro Yabune; Masashi Nose; Tadahiro Ohmi
We report on the improvement in efficiency of deionized water rinsing after using a H2SO4/H2O2/HF mixture which produces hydrophobic Si surfaces by means of fluorine passivation, providing better sulfur removal and shorter rinsing time than the conventional H2SO4/H2O2 mixture. After removing this passivation agent by rinsing in deionized water, the surfaces are still covered with chemical oxide, which protects them from organic contamination. Furthermore this treatment does not induce surface roughening.
Archive | 1995
Matagoro Maeno; Masayuki Miyashita; Hirohisa Kikuyama; Tatsuhiro Yabune; Jun Takano; Hirofumi Fukui; Satoshi Miyazawa; Chisato Iwasaki; Tadahiro Ohmi; Yasuhiko Kasama; Hitoshi Seki
Archive | 2002
Hirohisa Kikuyama; Tatsuhiro Yabune; Masayuki Miyashita; Tadahiro Ohmi
Archive | 2009
Masahide Waki; Tatsuhiro Yabune; Kazuhiro Miyamoto; Kazutaka Hirano
Archive | 2008
Hirohisa Kikuyama; Tatsuhiro Yabune; Masayuki Miyashita; Tadahiro Ohmi
Archive | 2002
Hirohisa Kikuyama; Masayuki Miyashita; Tatsuhiro Yabune; Tadahiro Ohmi
Archive | 2001
Hirohisa Kikuyama; Masayuki Miyashita; Tadahiro Omi; Tatsuhiro Yabune; 忠弘 大見; 雅之 宮下; 裕久 菊山; 辰弘 藪根
Archive | 1997
Hirohisa Kikuyama; Masayuki Miyashita; Tatsuhiro Yabune; Tadahiro Ohmi
Archive | 2001
Hirohisa Kikuyama; Masayuki Miyashita; Tadahiro Omi; Tatsuhiro Yabune; 忠弘 大見; 雅之 宮下; 裕久 菊山; 辰弘 藪根
Archive | 2009
Masahide Waki; Tatsuhiro Yabune; Kazuhiro Miyamoto; Kazutaka Hirano
