Tetsuro Makita | Researchain

Archive Network Publication Hotspot Collaboration

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Tetsuro Makita is active.

Explore More

Publication

Featured researches published by Tetsuro Makita.

international electron devices meeting | 1995

Novel stacked capacitor technology for 1 Gbit DRAMs with CVD-(Ba,Sr)TiO/sub 3/ thin films on a thick storage node of Ru

Akimasa Yuuki; Mikio Yamamuka; Tetsuro Makita; T. Horikawa; Teruo Shibano; N. Hirano; H. Maeda; Noboru Mikami; Kouichi Ono; H. Ogata; H. Abe

Simple stacked cell capacitors for 1 Gbit DRAMs have been constructed with a thick storage node of ruthenium (Ru) and high dielectric constant CVD-(Ba,Sr)TiO/sub 3/ films of equivalent oxide thickness teq=0.50 nm with an excellent step coverage. A storage capacitance of 30 fF/cell was shown to be realized for storage nodes 0.24 /spl mu/m wide, 0.60 /spl mu/m deep, and 0.20 /spl mu/m high, with a charge loss below 19% of the initial stored charge during a pause-refresh time of 10 s in 1 Gbit DRAMs.

Archive | 1995

Apparatus for forming thin film by chemical vapor deposition

Akimasa Yuuki; Takaaki Kawahara; Tetsuro Makita; Mikio Yamamuka; Koichi Ono; Tomonori Okudaira

Archive | 1997

High dielectric constant thin film structure, method for forming high dielectric constant thin film and apparatus for forming high dielectric constant thin film

Takaaki Kawahara; Mikio Yamamuka; Tetsuro Makita; Tsuyoshi Horikawa; Akimasa Yuuki; Teruo Shibano

Archive | 1996

Semiconductor device having a capacitor electrode formed of iridum or ruthenium and a quantity of oxygen

T. Horikawa; Tetsuro Makita; Takeharu Kuroiwa; Noboru Mikami; Teruo Shibano

Archive | 1996

Semiconductor device which includes a capacitor having a lower electrode formed of iridium or ruthenium

Takeharu Kuroiwa; Tsuyoshi Horikawa; Tetsuro Makita; Noboru Mikami; Teruo Shibano

Archive | 1992

Liquid crystal display device having heat-insulating members and driving circuit boards attached to rear edges of light box

Kohei Adachi; Hideaki Otsuki; Kenichi Niki; Hayato Takasago; Tetsuro Makita

Archive | 2012

Screen printing apparatus

Kenichi Niki; Tetsuro Makita; Hayato Takasago

Archive | 1998

Semiconductor memory device and method for producing the same

Takeharu Kuroiwa; Tsuyoshi Horikawa; Noboru Mikami; Tetsuro Makita

Archive | 1997

Semiconductor device with x-ray absorption layer

Tsuyoshi Horikawa; Yoshikazu Tsunemine; Takeharu Kuroiwa; Tetsuro Makita; Noboru Mikami

Archive | 1993

Vorrichtung zur Ausbildung einer Dünnschicht unter Verwendung eines Lasers

Kenyu Haruta; Koichi Ono; Hitoshi Wakata; Mutsumi Tsuda; Yoshio Saito; Keisuke Nanba; Kazuyoshi Kojima; Tetsuya Takami; Akihiro Suzuki; Tomohiro Sasagawa; Kenichi Kuroda; Toshiyuki Oishi; Yukihiko Wada; Akihiko Furukawa; Yasuji Matsui; Akimasa Yuki; Takaaki Kawahara; Hideki Yabe; Taisuke Furukawa; Kouji Kise; Noboru Mikami; Tsuyoshi Horikawa; Tetsuro Makita; Kazuo Kuramoto; Naohiko Fujino; Hiroshi Kuroki; Tetsuo Ogama; Junji Tanimura

Explore More