Takaaki Kawahara | Researchain

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Featured researches published by Takaaki Kawahara.

Archive | 1995

Apparatus for forming thin film by chemical vapor deposition

Akimasa Yuuki; Takaaki Kawahara; Tetsuro Makita; Mikio Yamamuka; Koichi Ono; Tomonori Okudaira

Archive | 1997

High dielectric constant thin film structure, method for forming high dielectric constant thin film and apparatus for forming high dielectric constant thin film

Takaaki Kawahara; Mikio Yamamuka; Tetsuro Makita; Tsuyoshi Horikawa; Akimasa Yuuki; Teruo Shibano

Archive | 1996

Thin film forming apparatus using laser and magnetic field

Kenyu Haruta; Koichi Ono; Mutsumi Tsuda; Takaaki Kawahara; Taisuke Furukawa

Archive | 2001

Chemical vapor deposition apparatus and a method of manufacturing a semiconductor device

Mikio Yamamuka; Takaaki Kawahara; Masayoshi Tarutani; Tsuyoshi Horikawa; Shigeru Matsuno; Takehiko Sato

Archive | 1999

Vaporizer for chemical vapor deposition apparatus, chemical vapor deposition apparatus, and semiconductor device manufactured thereby

Masayoshi Tarutani; Tsuyoshi Horikawa; Takaaki Kawahara; Mikio Yamamuka; Shigeru Matsuno; Takehiko Sato

Archive | 1998

CVD apparatus for forming thin film having high dielectric constant

Masayoshi Tarutani; Tsuyoshi Horikawa; Takaaki Kawahara; Mikio Yamamuka

Archive | 1994

CVD method and apparatus therefor

Akimasa Yuuki; Takaaki Kawahara; Kouitirou Tsutahara; Touru Yamaguchi

Archive | 2001

Method of forming high dielectric constant thin film and method of manufacturing semiconductor device

Takaaki Kawahara; Mikio Yamamuka; Tsuyoshi Horikawa; Masayoshi Tarutani; Takehiko Sato; Shigeru Matsuno

Archive | 1997

Method of uniform CVD

Akimasa Yuuki; Takaaki Kawahara; Kouitirou Tsutahara; Touru Yamaguchi

Archive | 1993

Vorrichtung zur Ausbildung einer Dünnschicht unter Verwendung eines Lasers

Kenyu Haruta; Koichi Ono; Hitoshi Wakata; Mutsumi Tsuda; Yoshio Saito; Keisuke Nanba; Kazuyoshi Kojima; Tetsuya Takami; Akihiro Suzuki; Tomohiro Sasagawa; Kenichi Kuroda; Toshiyuki Oishi; Yukihiko Wada; Akihiko Furukawa; Yasuji Matsui; Akimasa Yuki; Takaaki Kawahara; Hideki Yabe; Taisuke Furukawa; Kouji Kise; Noboru Mikami; Tsuyoshi Horikawa; Tetsuro Makita; Kazuo Kuramoto; Naohiko Fujino; Hiroshi Kuroki; Tetsuo Ogama; Junji Tanimura

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