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Thien T. Nguyen

Advanced Micro Devices

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Publication

Featured researches published by Thien T. Nguyen.

Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing II | 1995

Optical studies of fluorocarbon film formation by a high-density plasma etcher

Ronald A. Carpio; Burt W. Fowler; Thien T. Nguyen

Fourier-transform infrared spectroscopy and spectroscopic ellipsometry are used to determine the composition and thickness of the fluorocarbon polymer formed during etching of silicon dioxide films on silicon substrates using C2F6 in a high- density plasma. The fluorocarbon polymer is characterized as the key process parameters are systematically varied.

Archive | 1999

Method of forming an ultrathin gate dielectric

Mark I. Gardner; Thien T. Nguyen

Archive | 1999

Method of making a high performance transistor with elevated spacer formation and self-aligned channel regions

Mark I. Gardner; Thien T. Nguyen; Charles E. May

Archive | 1998

Method of making high performance MOSFET with channel scaling mask feature

Mark I. Gardner; Thien T. Nguyen

Archive | 1998

Method of fabricating ultra thin nitride spacers and device incorporating same

Thien T. Nguyen; Mark I. Gardner; Charles E. May

Archive | 1999

Method of fabrication for ultra thin nitride liner in silicon trench isolation

Thien T. Nguyen; Mark I. Gardner; Frederick N. Hause

Archive | 1998

Integration of a diffusion barrier layer and a counter dopant region to maintain the dopant level within the junctions of a transistor

Mark I. Gardner; Derrick J. Wristers; Thien T. Nguyen

Archive | 1999

Method of fabricating sub-micron metal lines

Thien T. Nguyen; Mark I. Gardner

Archive | 1998

Device and method for etching nitride spacers formed upon an integrated circuit gate conductor

Thien T. Nguyen; Mark I. Gardner; Charles E. May

Archive | 1996

SOG etchant gas and method for using same

Thien T. Nguyen

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Mark I. Gardner

Advanced Micro Devices

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Charles E. May

Advanced Micro Devices

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Burt W. Fowler

SEMATECH

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Derrick J. Wristers

Advanced Micro Devices

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Frederick N. Hause

Advanced Micro Devices

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Michael Patrick McFee

Advanced Micro Devices

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Ronald A. Carpio

SEMATECH

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Stephanie Grahn

Advanced Micro Devices

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