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Thomas Hamelin

Tokyo Electron

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Publication

Featured researches published by Thomas Hamelin.

Archive | 2004

Processing system and method for treating a substrate

Thomas Hamelin; Jay Wallace; Arthur H. Laflamme

Archive | 2003

Processing system and method for chemically treating a substrate

Thomas Hamelin; Jay Wallace; Arthur H. Laflamme

Archive | 2003

Reduced maintenance chemical oxide removal (COR) processing system

Arthur H. Laflamme; Thomas Hamelin; Jay Wallace

Archive | 2003

Processing system and method for thermally treating a substrate

Thomas Hamelin; Jay Wallace; Arthur H. Laflamme

Archive | 2004

Substrate Holder Having a Fluid Gap and Method of Fabricating the Substrate Holder

Thomas Hamelin

Archive | 2004

Method and apparatus for thermally insulating adjacent temperature controlled processing chambers

Jay Wallace; Thomas Hamelin

Archive | 2006

Gas distribution system for a post-etch treatment system

Yuji Tsukamoto; H. Tomozawa; Sam Kim; Thomas Hamelin

Archive | 2008

HIGH THROUGHPUT PROCESSING SYSTEM FOR CHEMICAL TREATMENT AND THERMAL TREATMENT AND METHOD OF OPERATING

Jay Wallace; Thomas Hamelin

Archive | 2006

Post-etch treatment system for removing residue on a substrate

Yuji Tsukamoto; Thomas Hamelin; Yasuhisu Kudo

Archive | 2008

High throughput thermal treatment system and method of operating

Thomas Hamelin; Arthur H. Laflamme; Gregory R. Whyman

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Jay Wallace

Tokyo Electron

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Arthur H. Laflamme

Tokyo Electron

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Yuji Tsukamoto

Tokyo Electron

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Gregory R. Whyman

Tokyo Electron

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H. Tomozawa

Tokyo Electron

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Paul Moroz

Tokyo Electron

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Sam Kim

Tokyo Electron

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