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Timothy Michaelson

Applied Materials

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Publication

Featured researches published by Timothy Michaelson.

Archive | 2011

Atomic layer deposition of photoresist materials and hard mask precursors

Timothy W. Weidman; Timothy Michaelson; Paul Deaton

Archive | 2014

Methods Of Selective Layer Deposition

David Thompson; Huixiong Dai; Patrick M. Martin; Timothy Michaelson; Kadthala R. Narendrnath; Robert Jan Visser; Jingjing Xu; Lin Zhang

Archive | 2014

Resist hardening and development processes for semiconductor device manufacturing

Peng Xie; Christopher Dennis Bencher; Huixiong Dai; Timothy Michaelson; Subhash Deshmukh

Archive | 2011

Radiation Patternable CVD Film

Timothy W. Weidman; Timothy Michaelson; Paul Deaton; Nitin K. Ingle; Abhijit Basu Mallick; Amit Chatterjee

Archive | 2013

Atomic Layer Deposition Of Films Using Precursors Containing Hafnium Or Zirconium

Timothy Michaelson; Timothy W. Weidman; Paul Deaton

Archive | 2015

Cyclic Spike Anneal Chemical Exposure For Low Thermal Budget Processing

David Thompson; Huixiong Dai; Patrick M. Martin; Timothy Michaelson; Kadthala R. Narendrnath; Robert Jan Visser; Jingjing Xu; Lin Zhang

Archive | 2013

Planarized extreme ultraviolet lithography blank, and manufacturing and lithography systems therefor

Cara Beasley; Ralf Hofmann; Majeed A. Foad; Timothy Michaelson

Archive | 2014

Atomic layer deposition of hafnium or zirconium alloy films

Timothy W. Weidman; Timothy Michaelson; Paul F. Ma; Paul Deaton

Archive | 2013

Vapor Deposition Deposited Photoresist, And Manufacturing And Lithography Systems Therefor

Timothy Michaelson; Timothy W. Weidman; Barry Lee Chin; Majeed A. Foad; Paul Deaton

Archive | 2016

SYSTEM AND METHOD FOR MANUFACTURING PLANARIZED EXTREME ULTRAVIOLET LITHOGRAPHY BLANK

Cara Beasley; Ralf Hofmann; Majeed A. Foad; Timothy Michaelson

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Paul Deaton

Applied Materials

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Timothy W. Weidman

Applied Materials

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Huixiong Dai

Applied Materials

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David Thompson

Applied Materials

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Jingjing Xu

Applied Materials

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Kadthala R. Narendrnath

Applied Materials

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Lin Zhang

Applied Materials

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Majeed A. Foad

Applied Materials

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Patrick M. Martin

Applied Materials

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Robert Jan Visser

Applied Materials

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