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Kadthala R. Narendrnath

Applied Materials

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Publication

Featured researches published by Kadthala R. Narendrnath.

Archive | 1997

Electrostatic chuck having improved gas conduits

Edwin C. Weldon; Kenneth S. Collins; Arik Donde; Brian Lue; Dan Maydan; Robert J. Steger; Timothy Dyer; Ananda H. Kumar; Alexander M. Veytser; Kadthala R. Narendrnath; Semyon L. Kats; Arnold Kholodenko; Shamouil Shamouilian; Dennis S. Grimard

Archive | 1999

Electrostatic chuck having gas cavity and method

Arnold Kholodenko; Shamouil Shamouilian; You Wang; Wing L. Cheng; Alexander M. Veytser; Surinder S. Bedi; Kadthala R. Narendrnath; Semyon L. Kats; Dennis S. Grimard; Ananda H. Kumar

Archive | 1998

Compliant bond structure for joining ceramic to metal

Ananda H. Kumar; Kadthala R. Narendrnath; Shamouil Shamouilian

Archive | 2001

Electrostatic chuck bonded to base with a bond layer and method

You Wang; Shamouil Shamouilian; Arnold Kholodenko; Alexander M. Veytser; Surinder S. Bedi; Kadthala R. Narendrnath; Semyon L. Kats; Dennis S. Grimard; Wing L. Cheng; Ananda H. Kumar

Archive | 2002

Electrostatic chuck having composite dielectric layer and method of manufacture

Edwin C. Weldon; Kenneth S. Collins; Arik Donde; Brian Lue; Dan Maydan; Robert J. Steger; Timothy Dyer; Ananda H. Kumar; Alexander M. Veytser; Kadthala R. Narendrnath; Semyon L. Kats; Arnold Kholodenko; Shamouil Shamouilian; Dennis S. Grimard

Archive | 2001

Electrostatic chuck having heater and method

You Wang; Shamouil Shamouilian; Arnold Kholodenko; Alexander M. Veytser; Surinder S. Bedi; Kadthala R. Narendrnath; Semyon L. Kats; Dennis S. Grimard; Wing L. Cheng; Ananda H. Kumar

Archive | 2001

Fabricating an electrostatic chuck having plasma resistant gas conduits

Kadthala R. Narendrnath; Shamouil Shamouilian; Dennis S. Grimard

Archive | 2000

Dielectric covered electrostatic chuck

Edwin C. Weldon; Kenneth S. Collins; Arik Donde; Brian Lue; Dan Maydan; Robert J. Steger; Timothy Dyer; Ananda H. Kumar; Alexander M. Veytser; Kadthala R. Narendrnath; Semyon L. Kats; Arnold Kholodenko; Shamouil Shamouilian; Dennis S. Grimard

Archive | 2000

Apparatus for measuring pedestal and substrate temperature in a semiconductor wafer processing system

Kadthala R. Narendrnath; Liang-Guo Wang; Shamouil Shamouilian; Paul E. Luscher; Hamid Noorbakhsh

Archive | 1999

Electrostatic chuck having composite base and method

Shamouil Shamouilian; Ananda H. Kumar; Arnold Kholodenko; You Wang; Alexander M. Veytser; Surinder S. Bedi; Kadthala R. Narendrnath; Semyon L. Kats; Dennis S. Grimard; Wing L. Cheng

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Shamouil Shamouilian

Applied Materials

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Ananda H. Kumar

Applied Materials

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Ashish Bhatnagar

Applied Materials

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Dennis S. Grimard

Applied Materials

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Alexander M. Veytser

Applied Materials

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Arnold Kholodenko

Applied Materials

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Semyon L. Kats

Applied Materials

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Govinda Raj

Applied Materials

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Surinder S. Bedi

Applied Materials

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Edwin C. Weldon

Applied Materials

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