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Paul Deaton

Applied Materials

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Publication

Featured researches published by Paul Deaton.

Archive | 2007

Control of gas flow and delivery to suppress the formation of particles in an MOCVD/ALD system

Son T. Nguyen; Kedarnath Sangam; Miriam Schwartz; Kenric Choi; Sanjay Bhat; Pravin K. Narwankar; Shreyas Kher; Rahul Sharangapani; Shankar Muthukrishnan; Paul Deaton

Archive | 1991

Suspension system for semiconductor reactors

Joseph C. Moore; Paul Deaton

Archive | 1992

Semiconductor processing machine and suspension system for use in same

Joseph C. Moore; Paul Deaton

Archive | 2011

Atomic layer deposition of photoresist materials and hard mask precursors

Timothy W. Weidman; Timothy Michaelson; Paul Deaton

Archive | 1999

Multi-ledge substrate support for a thermal processing chamber

Paul Deaton; Meredith J. Williams

Archive | 1997

Co-rotating edge ring extension for use in a semiconductor processing chamber

Benjamin Bierman; Meredith J. Williams; David S. Ballance; Brian Haas; Paul Deaton; James V. Tietz

Archive | 1997

Method and apparatus for achieving temperature uniformity of a substrate

Meredith J. Williams; David S. Ballance; Benjamin Bierman; Paul Deaton; Brian Haas; Nobuyuki Takahashi; James V. Tietz

Archive | 2006

Ampoule for liquid draw and vapor draw with a continuous level sensor

Kenric Choi; Pravin K. Narwankar; Shreyas Kher; Son T. Nguyen; Paul Deaton; Khai Ngo; Paul Chhabra; Alan Ouye; Dien-Yeh Wu

Archive | 1991

Particulate reduction baffle with wafer catcher for chemical-vapor-deposition apparatus

Paul Deaton; Norma B. Riley; James V. Rinnovatore

Archive | 1997

Method and apparatus for purging the back side of a substrate

David S. Ballance; Benjamin Bierman; Paul Deaton; Brian Haas; James V. Tietz; Meredith J. Williams

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Collaboration

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Meredith J. Williams

Applied Materials

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Timothy Michaelson

Applied Materials

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Timothy W. Weidman

Applied Materials

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Benjamin Bierman

Applied Materials

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Brian Haas

Applied Materials

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David S. Ballance

Applied Materials

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James V. Tietz

Applied Materials

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Joseph C. Moore

Applied Materials

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Kenric Choi

Applied Materials

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Pravin K. Narwankar

Applied Materials

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