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Timothy S. Dyer

Cymer, Inc.

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Publication

Featured researches published by Timothy S. Dyer.

Optical Microlithography XVII | 2004

Long-term reliable operation of a MOPA-based ArF light source for microlithography

Toshihiko Ishihara; Herve A. Besaucele; Cynthia A. Maley; Vladimir B. Fleurov; Patrick O'Keeffe; Mary Haviland; Richard G. Morton; Walter D. Gillespie; Timothy S. Dyer; Bryan G. Moosman; Robert Poole

Since the introduction of the XLA-100 in January 2003, we have built, tested, and shipped a large number of XLA-100 MOPA lasers to microlithography scanner manufacturers. Some systems have already been installed at chip fabrication lines. To ensure product design robustness, we have been performing a long-term system performance test of an XLA-100 laser at Cymer. In this paper, we will report optical performance of the XLA-100 we see during manufacturing final tests, and a summary of the long term testing.

Archive | 2003

Extreme ultraviolet light source

Stephan T. Melnychuk; William N. Partlo; Igor V. Fomenkov; I. Roger Oliver; Richard M. Ness; N. Böwering; Oleh V. Khodykin; Curtis L. Rettig; Gerry M. Blumenstock; Timothy S. Dyer; Rodney D. Simmons; Jerzy R. Hoffman; R. Mark Johnson

Archive | 2004

EUV light source optical elements

N. Böwering; Alexander I. Ershov; Timothy S. Dyer; Hugh R. Grinolds

Archive | 2002

High rep-rate laser with improved electrodes

Richard G. Morton; Timothy S. Dyer; Thomas D. Steiger; Richard C. Ujazdowski; Tom A. Watson; Bryan G. Moosman; Alex P. Ivaschenko; Walter D. Gillespie; Curtis L. Rettig

Archive | 2005

Line narrowing module

Martin J Algots; Robert A. Bergstedt; Walter D. Gillespie; Vladimir Kulgeyko; William N. Partlo; German E. Rylov; Richard L. Sandstrom; Brian D Strate; Timothy S. Dyer

Archive | 2002

Laser chamber insulator with sealed electrode feedthrough

Richard C. Ujazdowski; Timothy S. Dyer; William N. Partlo; Michael Altheim; Brian D Strate; Thomas Hofmann

Archive | 2005

Gas discharge laser chamber improvements

William N. Partlo; Yoshiho Amada; James A Carmichael; Timothy S. Dyer; Walter D. Gillespie; Bryan G. Moosman; Richard G. Morton; Curtis L. Rettig; Brian D Strate; Thomas D. Steiger; Fedor Trintchouk; Richard C. Ujazdowski

Archive | 2004

Electrodes for fluorine gas discharge lasers

Richard G. Morton; Bryan G. Moosman; Timothy S. Dyer; James A Carmichael; Jiping Zhang

Archive | 2002

Electric discharge laser with two-material electrodes

Richard G. Morton; Timothy S. Dyer

Archive | 2004

Halogen gas discharge laser electrodes

Thomas D. Steiger; Richard C. Ujazdowski; Timothy S. Dyer; Thomas P. Duffey; Walter D. Gillespie; Bryan G. Moosman; Richard G. Morton; Brian D Strate

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Bryan G. Moosman

Cymer

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Walter D. Gillespie

Cymer

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Brian D Strate

Cymer

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Richard C. Ujazdowski

Cymer

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Richard G. Morton

Cymer

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Thomas D. Steiger

Cymer

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William N. Partlo

Cymer

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Curtis L. Rettig

Cymer

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James A Carmichael

Cymer

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N. Böwering

Cymer

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