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Dive into the research topics where Babak Kadkhodayan is active.

Publication


Featured researches published by Babak Kadkhodayan.


Archive | 2012

Clamped showerhead electrode assembly

Babak Kadkhodayan; Rajinder Dhindsa; Anthony de la Llera; Michael C. Kellogg


Archive | 2004

Yttria insulator ring for use inside a plasma chamber

Babak Kadkhodayan; Rajinder Dhindsa; Yuehong Fu


Archive | 2003

Uniform etch system

Dean J. Larson; Babak Kadkhodayan; Di Wu; Kenji Takeshita; Bi-Ming Yen; Xingcai Su; William M. Denty; Peter Loewenhardt


Archive | 2009

Edge ring assembly with dielectric spacer ring

Jeremy Chang; Andreas Fischer; Babak Kadkhodayan


Archive | 2008

Hollow anode plasma reactor and method

David W. Benzing; Babak Kadkhodayan


Archive | 2002

Gas distribution system with tuning gas

Dean J. Larson; Babak Kadkhodayan; Di Wu; Kenji Takeshita; Bi-Ming Yen; Xingcai Su; William M. Denty; Peter Loewenhardt


Archive | 2010

Local plasma confinement and pressure control arrangement and methods thereof

Rajinder Dhindsa; Michael C. Kellogg; Babak Kadkhodayan; Andrew D. Bailey


Archive | 2009

SHOWERHEAD ELECTRODE WITH CENTERING FEATURE

Babak Kadkhodayan; Anthony de la Llera


Archive | 1999

Plasma processing system apparatus, and method for delivering RF power to a plasma processing

Andreas Fischer; Babak Kadkhodayan; Andras Kuthi


Archive | 2000

Plasma processing system, apparatus, and method for delivering rf power to a plasma processing chamber

Andreas Fischer; Babak Kadkhodayan; Andras Kuthi

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