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Babak Kadkhodayan

Lam Research

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Publication

Featured researches published by Babak Kadkhodayan.

Archive | 2012

Clamped showerhead electrode assembly

Babak Kadkhodayan; Rajinder Dhindsa; Anthony de la Llera; Michael C. Kellogg

Archive | 2004

Yttria insulator ring for use inside a plasma chamber

Babak Kadkhodayan; Rajinder Dhindsa; Yuehong Fu

Archive | 2003

Uniform etch system

Dean J. Larson; Babak Kadkhodayan; Di Wu; Kenji Takeshita; Bi-Ming Yen; Xingcai Su; William M. Denty; Peter Loewenhardt

Archive | 2009

Edge ring assembly with dielectric spacer ring

Jeremy Chang; Andreas Fischer; Babak Kadkhodayan

Archive | 2008

Hollow anode plasma reactor and method

David W. Benzing; Babak Kadkhodayan

Archive | 2002

Gas distribution system with tuning gas

Dean J. Larson; Babak Kadkhodayan; Di Wu; Kenji Takeshita; Bi-Ming Yen; Xingcai Su; William M. Denty; Peter Loewenhardt

Archive | 2010

Local plasma confinement and pressure control arrangement and methods thereof

Rajinder Dhindsa; Michael C. Kellogg; Babak Kadkhodayan; Andrew D. Bailey

Archive | 2009

SHOWERHEAD ELECTRODE WITH CENTERING FEATURE

Babak Kadkhodayan; Anthony de la Llera

Archive | 1999

Plasma processing system apparatus, and method for delivering RF power to a plasma processing

Andreas Fischer; Babak Kadkhodayan; Andras Kuthi

Archive | 2000

Plasma processing system, apparatus, and method for delivering rf power to a plasma processing chamber

Andreas Fischer; Babak Kadkhodayan; Andras Kuthi

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Collaboration

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Rajinder Dhindsa

Lam Research

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Andreas Fischer

Lam Research

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Anthony de la Llera

Lam Research

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Bi-Ming Yen

Lam Research

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Dean J. Larson

Lam Research

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Di Wu

Lam Research

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Kenji Takeshita

Lam Research

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Michael C. Kellogg

Lam Research

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Peter Loewenhardt

Lam Research

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William M. Denty

Lam Research

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