Toru Satake | Researchain

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Archive | 2004

Inspection apparatus by charged particle beam and method for manufacturing device using inspection apparatus

Masaki Hatakeyama; Toshifumi Kaneuma; Tsutomu Karimata; Takeshi Murakami; Shinji Nomichi; Toru Satake; Takuji Sofugawa; Kenichi Suematsu; Ryo Tajima; Yutaka Tanabe; Keiichi Toyama; Kenji Watanabe; Seiji Yoshikawa; 徹佐竹; 省二吉川; 拓司曽布川; 健一末松; 武司村上; 賢治渡辺; 努狩俣; 涼田島; 豊田部; 雅規畠山; 敬一遠山; 伸治野路; 利文金馬

Archive | 2005

Inspection apparatus and method by electron beam, and device manufacturing method using the inspection apparatus

Masaki Hatakeyama; Tsutomu Karimata; Takeshi Murakami; Ichirota Nagahama; Takamitsu Nagai; Mamoru Nakasuji; Shinji Nomichi; Toru Satake; Takuji Sofugawa; Kazuyoshi Sugihara; Kenji Watanabe; Yuichiro Yamazaki; Seiji Yoshikawa; 護中筋; 徹佐竹; 省二吉川; 裕一郎山崎; 拓司曽布川; 和佳杉原; 武司村上; 隆光永井; 賢治渡辺; 努狩俣; 雅規畠山; 伸治野路; 一郎太長濱

Archive | 2003

ELECTRON BEAM EQUIPMENT AND DEVICE MANUFACTURING METHOD USING THE SAME

Takao Kato; Takeshi Murakami; Mamoru Nakasuji; Toru Satake; Kenji Watanabe; 護中筋; 徹佐竹; 隆男加藤; 武司村上; 賢治渡辺

Archive | 2004

Defect inspection method and device manufacturing method

Toshifumi Kaneuma; Mamoru Nakasuji; Toru Satake; 護中筋; 徹佐竹; 利文金馬

Archive | 2001

Inspection device of pattern, inspection method of pattern, and manufacturing method of the inspection device

Masaki Hatakeyama; Toshifumi Kaneuma; Shinji Nomichi; Toru Satake; Kenji Watanabe; 徹佐竹; 賢治渡辺; 雅規畠山; 伸治野路; 利文金馬

Archive | 2003

Mapping projectiion electron beam device

Masaki Hatakeyama; Toshifumi Kaneuma; Tsutomu Karimata; Takeshi Murakami; Shinji Nomichi; Toru Satake; Takuji Sofugawa; Kenji Watanabe; 徹佐竹; 拓司曽布川; 武司村上; 賢治渡辺; 努狩俣; 雅規畠山; 伸治野路; 利文金馬

Archive | 2004