Yuichiro Yamazaki | Researchain

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Featured researches published by Yuichiro Yamazaki.

Archive | 2001

Inspection system by charged particle beam and method of manufacturing devices using the system

Mamoru Nakasuji; Nobuharu Noji; Tohru Satake; Masahiro Hatakeyama; Toshifumi Kimba; Hiroshi Sobukawa; Shoji Yoshikawa; Takeshi Murakami; Kenji Watanabe; Tsutomu Karimata; Shin Oowada; Mutsumi Saito; Yuichiro Yamazaki; Takamitsu Nagai; Ichirota Nagahama

Archive | 2003

Electron beam apparatus and device manufacturing method using same

Ichirota Nagahama; Yuichiro Yamazaki; Kenji Watanabe; Masahiro Hatakeyama; Tohru Satake; Nobuharu Noji

Archive | 2008

Electron beam inspection system and inspection method and method of manufacturing devices using the system

Kenji Watanabe; Hirosi Sobukawa; Nobuharu Noji; Tohru Satake; Shoji Yoshikawa; Tsutomu Karimata; Mamoru Nakasuji; Masahiro Hatakeyama; Takeshi Murakami; Yuichiro Yamazaki; Ichirota Nagahama; Takamitsu Nagai; Kazuyoshi Sugihara

Archive | 2001

Charged particle beam inspection apparatus and method for fabricating device using that inspection apparatus

Mamoru Nakasuji; Nobuharu Noji; Tohru Satake; Masahiro Hatakeyama; Toshifumi Kimba; Hirosi Sobukawa; Shoji Yoshikawa; Takeshi Murakami; Kenji Watanabe; Tsutomu Karimata; Shin Oowada; Mutsumi Saito; Yuichiro Yamazaki; Takamitsu Nagai; Ichirota Nagahama

Archive | 2007

Electron beam apparatus with detailed observation function and sample inspecting and observing method using electron beam apparatus

Kenji Watanabe; Tohru Satake; Nobuharu Noji; Takeshi Murakami; Tsutomu Karimata; Yuichiro Yamazaki; Ichirota Nagahama; Atsushi Onishi

Archive | 2007

Electron beam apparatus and an aberration correction optical apparatus

Masahiro Hatakeyama; Takeshi Murakami; Nobuharu Noji; Mamoru Nakasuji; Hirosi Sobukawa; Satoshi Mori; Tsutomu Karimata; Yuichiro Yamazaki; Ichirota Nagahama

Archive | 2001

Inspection apparatus and inspection method with electron beam, and device manufacturing method comprising the inspection apparatus

Yuichiro Yamazaki; Kenji Watanabe; Hirosi Sobukawa; Nobuharu Noji; Tohru Satake; Shoji Yoshikawa; Tsutomu Karimata; Mamoru Nakasuji; Masahiro Hatakeyama; Takeshi Murakami; Ichirota Nagahama; Takamitsu Nagai; Kazuyoshi Sugihara

Archive | 2004