Troy S. Detrick
Applied Materials
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Featured researches published by Troy S. Detrick.
Proceedings of SPIE | 2016
Wenli Collison; Yii-Cheng Lin; Shannon Dunn; Hiroaki Takikawa; James Paris; Lucy Chen; Troy S. Detrick; Jun Belen; George Stojakovic; Michael Goss; Norman Fish; Min-Joon Park; Chih-Ming Sun; Mark Kelling; Pinyen Lin
In the Global 450mm Equipment Development Consortium (G450C), a 193i guided directed self-assembly (DSA) pattern has been used to create structures at the 14nm node and below. The first guided DSA patterned wafer was ready for etch process development within a month of the G450C’s first 193i patterned wafer availability with one litho pass. Etch processes were scaled up from 300mm to 450mm for a 28nm pitch STI stack and a 40nm pitch M1 BEOL stack. The effects of various process parameters were investigated to fine tune each process. Overall process window has been checked and compared. Excellent process stability results were shown for current etch chambers.
Archive | 1997
Fred C. Redeker; Romuald Nowak; Tetsuya Ishikawa; Troy S. Detrick; Dee Pinson Ii Jay
Archive | 1997
Hiroji Hanawa; Tetsuya Ishikawa; Manus Wong; Shijian Li; Kaveh F. Niazi; Kenneth Smyth; Fred C. Redeker; Troy S. Detrick; Dee Pinson Ii Jay
Archive | 2004
Steven Shannon; Dennis S. Grimard; Theodoros Panagopoulos; Daniel J. Hoffman; Michael G. Chafin; Troy S. Detrick; Alexander Paterson; Jingbao Liu; Taeho Shin; Bryan Pu
Archive | 2007
Shahid Rauf; Kenneth S. Collins; Kallol Bera; Kartik Ramaswamy; Andrew Nguyen; Steven Shannon; Lawrence Wong; Satoru Kobayashi; Troy S. Detrick; James P. Cruse
Archive | 2007
Shahid Rauf; Kenneth S. Collins; Kallol Bera; Kartik Ramaswamy; Hiroji Hanawa; Andrew Nguyen; Steven Shannon; Lawrence Wong; Satoru Kobayashi; Troy S. Detrick; James P. Cruse
Archive | 2007
Kenneth S. Collins; Hiroji Hanawa; Kartik Ramaswamy; Douglas A. Buchberger; Shahid Rauf; Kallol Bera; Lawrence Wong; Walter R. Merry; Matthew L. Miller; Steven Shannon; Andrew Nguyen; James P. Cruse; James D. Carducci; Troy S. Detrick; Subhash Deshmukh; Jennifer Y. Sun
Archive | 2007
Kenneth S. Collins; Hiroji Hanawa; Kartik Ramaswamy; Douglas A. Buchberger; Shahid Rauf; Kallol Bera; Lawrence Wong; Walter R. Merry; Matthew L. Miller; Steven Shannon; Andrew Nguyen; James P. Cruse; James D. Carducci; Troy S. Detrick; Subhash Deshmukh; Jennifer Y. Sun
Archive | 2008
Kenneth S. Collins; Hiroji Hanawa; Kartik Ramaswamy; Douglas A. Buchberger; Shahid Rauf; Kallol Bera; Lawrence Wong; Walter R. Merry; Matthew L. Miller; Steven Shannon; Andrew Nguyen; James P. Cruse; James D. Carducci; Troy S. Detrick; Subhash Deshmukh; Jennifer Y. Sun
Archive | 2007
Kenneth S. Collins; Hiroji Hanawa; Kartik Ramaswamy; Douglas A. Buchberger; Shahid Rauf; Kallol Bera; Lawrence Wong; Walter R. Merry; Matthew L. Miller; Steven Shannon; Andrew Nguyen; James P. Cruse; James D. Carducci; Troy S. Detrick; Subhash Deshmukh; Jennifer Y. Sun
