Network


Latest external collaboration on country level. Dive into details by clicking on the dots.

Hotspot


Dive into the research topics where Tsunehiro Sakai is active.

Publication


Featured researches published by Tsunehiro Sakai.


Archive | 2010

Semiconductor defect classifying method, semiconductor defect classifying apparatus, and semiconductor defect classifying program

Koichi Hayakawa; Takehiro Hirai; Yutaka Tandai; Tamao Ishikawa; Tsunehiro Sakai; Kazuhisa Hasumi; Kazunori Nemoto; Katsuhiko Ichinose; Yuji Takagi


Archive | 2009

IMAGE CLASSIFICATION STANDARD UPDATE METHOD, PROGRAM, AND IMAGE CLASSIFICATION DEVICE

Yuya Isomae; Fumiaki Endo; Tomohiro Funakoshi; Junko Konishi; Tsunehiro Sakai


Archive | 2014

Sample Observation Device

Ayumi Doi; Tomohiro Funakoshi; Takuma Yamamoto; Tomohiro Tamori; Tsunehiro Sakai


Archive | 2011

PATTERN REVIEW TOOL, RECIPE MAKING TOOL, AND METHOD OF MAKING RECIPE

Tsunehiro Sakai; Yuichi Hamamura


Archive | 2011

Pattern observation apparatus, recipe preparation apparatus, and recipe preparation method

Yuichi Hamamura; Tsunehiro Sakai; 恒弘 堺; 有一 濱村


Archive | 2009

OBSERVATION CONDITION DETERMINATION SUPPORT DEVICE AND OBSERVATION CONDITION DETERMINATION SUPPORT METHOD

Junko Konishi; Tomohiro Funakoshi; Tsunehiro Sakai


Proceedings of SPIE, the International Society for Optical Engineering | 2006

Analysis of 193nm immersion specific defects

Akihiko Otoguro; Jeung-woo Lee; Toshiro Itani; Kiyoshi Fujii; Tomohiro Funakoshi; Tsunehiro Sakai; Kenji Watanabe; Mikio Arakawa; Hitoshi Nakano; Masamichi Kobayashi


Archive | 2011

Pattern observation device, recipe production device, and recipe production method

Tsunehiro Sakai; 恒弘 堺; Yuichi Hamamura; 濱村 有一


Archive | 2011

RECIPE GENERATION APPARATUS, INSPECTION SUPPORT APPARATUS, INSPECTION SYSTEM, AND RECORDING MEDIA

Ryo Nakagaki; Yuichi Hamamura; Yuji Enomoto; Yutaka Tandai; Tsunehiro Sakai; Kazuhisa Hasumi


Archive | 2011

パターン観察装置,レシピ作成装置,レシピ作成方法

Tsunehiro Sakai; 恒弘 堺; Yuichi Hamamura; 濱村 有一

Collaboration


Dive into the Tsunehiro Sakai's collaboration.

Researchain Logo
Decentralizing Knowledge