U. Dürig

Near‐field optical‐scanning microscopy

Near‐field optical‐scanning (NFOS) microscopy or ‘‘optical stethoscopy’’ provides images with resolution in the 20‐nm range, i.e., a very small fraction of an optical wavelength. Scan images of metal films with fine structures presented in this paper convincingly demonstrate this resolution capability. Design of an NFOS microscope with tunnel distance regulation, its theoretical background, application potential, and limitations are discussed.

The Millipede: more than one thousand tips for future AFM data storage

We report on a new atomic force microscope (AFM)-based data storage concept called the “Millipede” that has a potentially ultrahigh density, terabit capacity, small form factor, and high data rate. Its potential for ultrahigh storage density has been demonstrated by a new thermomechanical local-probe technique to store and read back data in very thin polymer films. With this new technique, 30–40-nm-sized bit indentations of similar pitch size have been made by a single cantilever/tip in a thin (50-nm) polymethylmethacrylate (PMMA) layer, resulting in a data storage density of 400–500 Gb/in. 2 High data rates are achieved by parallel operation of large two-dimensional (2D) AFM arrays that have been batch-fabricated by silicon surface-micromachining techniques. The very large scale integration (VLSI) of micro/nanomechanical devices (cantilevers/tips) on a single chip leads to the largest and densest 2D array of 32 × 32 (1024) AFM cantilevers with integrated write/read storage functionality ever built. Time-multiplexed electronics control the write/read storage cycles for parallel operation of the Millipede array chip. Initial areal densities of 100–200 Gb/in. 2 have been achieved with the 32 × 32 array chip, which has potential for further improvements. In addition to data storage in polymers or other media, and not excluding magnetics, we envision areas in nanoscale science and technology such as lithography, high-speed/large-scale imaging, molecular and atomic manipulation, and many others in which Millipede may open up new perspectives and opportunities.

Millipede: a MEMS-based scanning-probe data-storage system

Ultrahigh storage densities of up to 1 Tbit/in./sup 2/ or more can be achieved by local-probe techniques to write, read back, and erase data in very thin polymer films. The thermomechanical scanning-probe-based data-storage concept called Millipede combines ultrahigh density, small form factor, and high data rate. After illustrating the principles of operation of the Millipede, we introduce system aspects related to the read-back process, multiplexing, and position-error-signal generation for tracking.

Atomic force microscope cantilevers for combined thermomechanical data writing and reading

Heat conduction governs the ultimate writing and reading capabilities of a thermomechanical data storage device. This work investigates transient heat conduction in a resistively heated atomic force microscope cantilever through measurement and simulation of cantilever thermal and electrical behavior. The time required to heat a single cantilever to bit-writing temperature is near 1 μs and the thermal data reading sensitivity ΔR/R is near 1×10−4 per vertical nm. Finite-difference thermal and electrical simulation results compare well with electrical measurements during writing and reading, indicating design tradeoffs in power requirements, data writing speed, and data reading sensitivity. We present a design for a proposed cantilever that is predicted to be faster and more sensitive than the present cantilever.

Design of atomic force microscope cantilevers for combined thermomechanical writing and thermal reading in array operation

In thermomechanical data writing, a resistively-heated atomic force microscope (AFM) cantilever tip forms indentations in a thin polymer film. The same cantilever operates as a thermal proximity sensor to detect the presence of previously written data bits. This paper uses recent progress in thermal analysis of the writing and reading modes to develop new cantilever designs for increased speed, sensitivity, and reduced power consumption in both writing and reading operation. Measurements of cantilever electrical resistance during heating reveals physical limits of cantilever writing and reading, and verifies a finite-difference thermal and electrical simulation of cantilever operation. This work proposes two new cantilever designs that correspond to fabrication technology benchmarks. Simulations predict that the proposed cantilevers have a higher data rate and are more sensitive than the present cantilever. The various cantilever designs offer single-bit writing times of 0.2 /spl mu/s-25 /spl mu/s for driving voltages of 2-25 V. The thermal reading /spl Delta/R/R sensitivity is as high as 4/spl times/10/sup -4/ per vertical nm in near steady-state operation.

VLSI-NEMS chip for parallel AFM data storage

Abstract We report the microfabrication of a 32×32 (1024) 2D cantilever array chip and its electrical testing. It has been designed for ultrahigh-density, high-speed data storage applications using thermomechanical writing and readout in thin polymer film storage media. The fabricated chip is the first very large scale integration (VLSI)-NEMS (NanoEMS) for nanotechnological applications. For electrical and thermal stability, the levers are made of silicon, and the heater/sensor element is defined as a lower, doped platform with the tip on top. Freestanding cantilevers are obtained with surface-micromachining techniques, which yield better mechanical stability and heatsinking of the chip than bulk-micromachining releasing techniques do. Two-wiring levels interconnect the cantilevers for a time-multiplexed row/column addressing scheme. By integrating a Schottky diode in series with each cantilever, a considerable reduction of crosstalk between cantilevers has been achieved.

Probe-based ultrahigh-density storage technology

Ultrahigh storage densities can be achieved by using a thermomechanical scanning-probe-based data-storage approach to write, read back, and erase data in very thin polymer films. High data rates are achieved by parallel operation of large two-dimensional arrays of cantilevers that can be batch fabricated by silicon-surface micromachining techniques. The very high precision required to navigate the storage medium relative to the array of probes is achieved by microelectromechanical system (MEMS)- based x and y actuators. The ultrahigh storage densities offered by probe-storage devices pose a significant challenge in terms of both control design for nanoscale positioning and read-channel design for reliable signal detection. Moreover, the high parallelism necessitates new dataflow architectures to ensure high performance and reliability of the system. In this paper, we present a small-scale prototype system of a storage device that we built based on scanning-probe technology. Experimental results of multiple sectors, recorded using multiple levers at 840 Gb/in2 and read back without errors, demonstrate the functionality of the prototype system. This is the first time a scanning-probe recording technology has reached this level of technical maturity, demonstrating the joint operation of all building blocks of a storage device.

Near‐field optical scanning microscopy in reflection

The resolution of near‐field optical scanning microscopy (NFOS) is determined by the dimensions of the microscopic light source rather than the diffraction limit. To demonstrate NFOS in reflection, intensity changes in the (backward) scattering from a 70–100 nm diam hole in a metal film were recorded while the sample was scanned in close proximity to this aperture. Raster‐scan images of a planar metal test pattern yield a resolution comparable to the size of the aperture.

Interaction force detection in scanning probe microscopy : methods and applications

Fundamental aspects of interaction force detection and force microscopy are discussed. A formalism is developed for studying the dynamics of experimental setups in general terms. The analysis focuses on stability criteria and resonant properties of the force sensor. The latter are important for measuring interaction force gradients. Experimental techniques used for interaction force detection are examined in detail. Finally, experimental results are presented that demonstrate the potential of combining atomic scale interaction force detection with scanning tunneling microscopy.

Dynamic force microscopy by means of the phase-controlled oscillator method

Dynamic force microscopy, a technique also known as non-contact force microscopy, has proved to be a powerful tool for atomic resolution imaging. A number of schemes have been developed, but recently the oscillator method has become the preferred operating mode. Here, the force sensor acts as resonator in an active feedback circuit. A practical implementation of the method is described and the underlying key concepts are discussed. It is shown that a tracking oscillator excitation scheme is superior to the more standard direct feedback method for cases in which the force sensor exhibits only a weak resonance enhancement. Furthermore, the simultaneous measurement of dissipative interaction channels is an important extension of dynamic force microscopy. It allows one to differentiate between sample materials via their plasto-mechanical response. As an example, a Cr test grating has been imaged in the constant force gradient mode. The dissipation measured on Cr-covered areas is significantly lower than that ...