Walter Häberle

The Millipede: more than one thousand tips for future AFM data storage

We report on a new atomic force microscope (AFM)-based data storage concept called the “Millipede” that has a potentially ultrahigh density, terabit capacity, small form factor, and high data rate. Its potential for ultrahigh storage density has been demonstrated by a new thermomechanical local-probe technique to store and read back data in very thin polymer films. With this new technique, 30–40-nm-sized bit indentations of similar pitch size have been made by a single cantilever/tip in a thin (50-nm) polymethylmethacrylate (PMMA) layer, resulting in a data storage density of 400–500 Gb/in. 2 High data rates are achieved by parallel operation of large two-dimensional (2D) AFM arrays that have been batch-fabricated by silicon surface-micromachining techniques. The very large scale integration (VLSI) of micro/nanomechanical devices (cantilevers/tips) on a single chip leads to the largest and densest 2D array of 32 × 32 (1024) AFM cantilevers with integrated write/read storage functionality ever built. Time-multiplexed electronics control the write/read storage cycles for parallel operation of the Millipede array chip. Initial areal densities of 100–200 Gb/in. 2 have been achieved with the 32 × 32 array chip, which has potential for further improvements. In addition to data storage in polymers or other media, and not excluding magnetics, we envision areas in nanoscale science and technology such as lithography, high-speed/large-scale imaging, molecular and atomic manipulation, and many others in which Millipede may open up new perspectives and opportunities.

Ultrahigh-density atomic force microscopy data storage with erase capability

We report a simple atomic force microscopy-based concept for a hard disk-like data storage technology. Thermomechanical writing by heating a Si cantilever in contact with a spinning polycarbonate disk has already been reported. Here the medium has been replaced with a thin polymer layer on a Si substrate, resulting in significant improvements in storage density. With this new medium, we achieve bit sizes of 10–50 nm, leading to data densities of 500 Gbit/in.2. We also demonstrate a novel high-speed and high-resolution thermal readback method, which uses the same Si cantilevers that are used in the writing process, and the capability to erase and rewrite data features repeatedly.

VLSI-NEMS chip for parallel AFM data storage

Abstract We report the microfabrication of a 32×32 (1024) 2D cantilever array chip and its electrical testing. It has been designed for ultrahigh-density, high-speed data storage applications using thermomechanical writing and readout in thin polymer film storage media. The fabricated chip is the first very large scale integration (VLSI)-NEMS (NanoEMS) for nanotechnological applications. For electrical and thermal stability, the levers are made of silicon, and the heater/sensor element is defined as a lower, doped platform with the tip on top. Freestanding cantilevers are obtained with surface-micromachining techniques, which yield better mechanical stability and heatsinking of the chip than bulk-micromachining releasing techniques do. Two-wiring levels interconnect the cantilevers for a time-multiplexed row/column addressing scheme. By integrating a Schottky diode in series with each cantilever, a considerable reduction of crosstalk between cantilevers has been achieved.

Probe-based ultrahigh-density storage technology

Ultrahigh storage densities can be achieved by using a thermomechanical scanning-probe-based data-storage approach to write, read back, and erase data in very thin polymer films. High data rates are achieved by parallel operation of large two-dimensional arrays of cantilevers that can be batch fabricated by silicon-surface micromachining techniques. The very high precision required to navigate the storage medium relative to the array of probes is achieved by microelectromechanical system (MEMS)- based x and y actuators. The ultrahigh storage densities offered by probe-storage devices pose a significant challenge in terms of both control design for nanoscale positioning and read-channel design for reliable signal detection. Moreover, the high parallelism necessitates new dataflow architectures to ensure high performance and reliability of the system. In this paper, we present a small-scale prototype system of a storage device that we built based on scanning-probe technology. Experimental results of multiple sectors, recorded using multiple levers at 840 Gb/in2 and read back without errors, demonstrate the functionality of the prototype system. This is the first time a scanning-probe recording technology has reached this level of technical maturity, demonstrating the joint operation of all building blocks of a storage device.

5×5 2D AFM cantilever arrays a first step towards a Terabit storage device

Abstract In this paper we report on the microfabrication of a 5×5 2D cantilever array and its successful application to parallel imaging. The 5×5 array with integrated force sensing and tip heating has been fabricated using a recently developed, all dry, silicon backside etching process. The levers on the array have integrated piezoresistive sensing, and are placed on a constriction in the lever to improve sensitivity. The array is scanned in x and y directions using voice coil actuators. Three additional voice coil z actuators are used in a triangular arrangement to approach the sample with the array chip. The system is thus leveled in the same way as an air table. We report details of the array fabrication, the x – y scanning and approach system as well as images taken with the system. The results are encouraging for the development of large-scale VLSI-Nano EMS, allowing the fabrication and operation of large AFM cantilever arrays to achieve high-data-rate Terabit storage systems.

A Vibration Resistant Nanopositioner for Mobile Parallel-Probe Storage Applications

We describe a planar microelectromechanical systems (MEMS)-based x/y nanopositioner designed for parallel-probe storage applications. The nanopositioner is actuated electromagnetically and has x/y motion capabilities of plusmn60 mum. The mechanical components are fabricated from a single-crystal silicon wafer using a deep-trench-etching process. To render the system robust against vibration, we utilize a mass-balancing concept that makes the system stiff against linear shock, but still compliant for actuation, and therefore results in low power consumption. We present details of the finite-element model used to design the device as well as experimental results for the frequency response, actuation, and vibration-rejection properties of the nanopositioner

Demonstration of thermomechanical recording at 641 Gbit/in/sup 2/

Ultrahigh storage areal densities can be achieved by using thermomechanical local-probe techniques to write, read back, and erase data in the form of nanometer-scale indentations in thin polymer films. This paper presents single-probe experimental results in which large data sets were recorded at 641 Gbit/in/sup 2/ and read back with raw bit-error rates better than 10/sup -4/. (d,k) modulation coding is used to mitigate the effect of partial erasing, occurring when subsequent indentations are spaced too closely together, and to increase the effective areal density. The physical indentation profile, the sensitivity of the probe in readback mode, and noise sources that affect data detection are also discussed. Quantitative measurements of the partial erasing effect in both the on-track and cross-track directions are reported.

Highly parallel data storage system based on scanning probe arrays

This letter discusses an alternative storage approach to conventional magnetic data storage. The approach uses a 32×32 array of scanning probe microscopes working in parallel to read and write data as small indentations in a polymer storage medium. The results have densities of 100–200 Gbit/in.2. At such densities, it is shown that well over half the array works, and at lower densities more than 80% of levers are working.

Scaling tape-recording areal densities to 100 Gb/in 2

We examine the issue of scaling magnetic tape-recording to higher areal densities, focusing on the challenges of achieving 100 Gb/in2 in the linear tape format. The current highest achieved areal density demonstrations of 6.7 Gb/in2 in the linear tape and 23.0 Gb/in2 in the helical scan format provide a reference for this assessment. We argue that controlling the head-tape interaction is key to achieving high linear density, whereas track-following and reel-to-reel servomechanisms as well as transverse dimensional stability are key for achieving high track density. We envision that advancements in media, data-detection techniques, reel-to-reel control, and lateral motion control will enable much higher areal densities. An achievable goal is a linear density of 800 Kb/in and a track pitch of 0.2 µm, resulting in an areal density of 100 Gb/in2.

“Millipede” – an AFM data storage system at the frontier of nanotribology

The “Millipede” data storage concept is based on the parallel operation of a large number of micromechanical levers that function as AFM sensors. The technique holds promise to evolve into a novel ultrahigh-density, terabit-capacity, and high-data-rate storage technology. Thermomechanical writing and reading in very thin polymer (PMMA) films is used to store and sense 30–40 nm sized bits of similar pitch size, resulting in 400–500 Gbit/in2 storage densities. High data rates are achieved by operating very large arrays (32×32) of AFM sensors in parallel. Batch-fabrication of 32×32 AFM cantilever array chips has been achieved, and array reading and writing have been demonstrated. An important consideration for the Millipede storage project is the polymer dynamics on the size scale of one bit. Scaling of rheological parameters measured for macroscopic polymer samples is likely to be incorrect due to the finite length of the underlying molecular polymer chain, a size that is comparable to the bit itself. In order to shed light on these issues we performed lifetime studies of regular arrays of nanometer size patterns using light-scattering techniques.