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Ulrich Schönhoff

Carl Zeiss AG

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Publication

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Archive | 2012

Anordnung zur Halterung eines optischen Elementes, insbesondere in einer EUV-Projektionsbelichtungsanlage

Michael Erath; Florian Bach; Ulrich Schönhoff; Rodolfo Rabe; Norbert Mühlberger; Dirk Eicher; Jasper Wesselingh

Archive | 2008

Optical element e.g. lens, for projection illumination system, has damping unit with sensor element detecting movement of element, and actuator element damping element by producing force or moment based on movement of element

Matthias Orth; Ulrich Schönhoff

Archive | 2013

Arrangement for actuation of optical element e.g. mirror in microlithography projection exposure system, has actuators that are arranged in natural vibration mode of the optical element

Sascha Bleidistel; Ulrich Schönhoff; Jürgen Fischer

Archive | 2012

OPTICAL MOUNT AND EUV EXPOSURE APPARATUS

Bernhard Geuppert; Rodolfo Rabe; Ulrich Schönhoff

Archive | 2014

Device for supporting optical device in lithography system, has additional control elements that are connected with auxiliary mass in force-transmitting manner for active attenuation of flexible modes of optical device

Ulrich Schönhoff; Markus Hauf; Bernhard Geuppert

Archive | 2017

Anordnung zur Positionsmanipulation eines Elementes in einem optischen System

Ulrich Schönhoff

Archive | 2016

Anordnung zur Positionsmanipulation eines Elementes, insbesondere in einem optischen System

Ulrich Schönhoff; Eylem Bektas; Markus Hauf

Archive | 2015

An arrangement for manipulating a position element, particularly in an optical system

Ulrich Schönhoff; Eylem Bektas; Markus Hauf

Archive | 2013

Arrangement for mounting an optical element such as extreme ultraviolet (EUV) projection exposure apparatus has damping element which brings about damping of natural vibration form of pin in a lateral direction

Bernhard Geuppert; Rodolfo Rabe; Ulrich Schönhoff

Archive | 2011

Arrangement for actuation of an element in a projection exposure system

Markus Hauf; Ulrich Schönhoff

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Markus Hauf

Carl Zeiss AG

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Rodolfo Rabe

Carl Zeiss AG

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Bernhard Geuppert

Carl Zeiss AG

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Dirk Eicher

Carl Zeiss AG

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Eylem Bektas

Carl Zeiss AG

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Florian Bach

Carl Zeiss AG

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Jasper Wesselingh

Carl Zeiss AG

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Michael Erath

Carl Zeiss AG

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Norbert Mühlberger

Carl Zeiss AG

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Jürgen Fischer

Carl Zeiss AG

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