Umesh Kelkar
Applied Materials
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Publication
Featured researches published by Umesh Kelkar.
ASME 2005 Summer Heat Transfer Conference collocated with the ASME 2005 Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems | 2005
Umesh Kelkar; Arvind Sundarrajan; Tza-Jing Gung; Ned Hammond; Ajay Bhatnagar; Xinyu Fu; Mark A. Perrin; John C. Forster; Prabu Gopalraja; Jianming Fu
A new physical vapor deposition source is developed to meet the challenges of barrier deposition for sub 100nm devices. The source employs multi-step process to deposit thin, conformal and uniform barrier films. This paper describes reactor scale modeling and simulation of deposition and etching plasmas used for barrier deposition. The modeling and simulation in tandem with experimental data demonstrate that the chamber can be used to independently control the particle fluxes as per the requirements of the deposition and etching steps. The simulation results were qualitatively used to optimize the ion flux uniformity by altering the magnetic fields near the wafer.© 2005 ASME
Archive | 2002
Praburam Gopalraja; Jianming Fu; Xianmin Tang; John C. Forster; Umesh Kelkar
Archive | 2000
Semyon Sherstinsky; Alison Gilliam; Paul Smith; Leonel A. Zuniga; Ted Yoshidome; Nitin Khurana; Rod Mosely; Umesh Kelkar; Joseph Yudovsky; Alan Popiolkowski
Archive | 2004
Praburam Gopalraja; Xianmin Tang; Jianming Fu; Mark A. Perrin; Jean Yue Phillip Wang; Arvind Sundarrajan; Hong Zhang; Jick M. Yu; Umesh Kelkar; Zheng Xu; Fusen Chen
Archive | 2001
Anantha K. Subramani; Umesh Kelkar; Jianming Fu; Praburam Gopalraja
Archive | 1999
Ashok K. Das; Nety M. Krishna; Marc O. Schweitzer; Nalin Patadia; Wei Yang; Umesh Kelkar; Vijay D. Parkhe; Scot Petitt; Nitin Khurana
Archive | 2006
Alan Ritchie; Donny Young; Ilyoung Richard Hong; Kathleen Scheible; Umesh Kelkar
Microelectronic Engineering | 2005
John C. Forster; Praburam Gopalraja; Tza-Jing Gung; Arvind Sundarrajan; Xinyu Fu; Ned Hammond; Jianming Fu; Umesh Kelkar; Ajay Bhatnagar
Archive | 2009
Yong Cao; Maurice E. Ewert; Xianmin Tang; Keith A. Miller; Daniel C. Lubben; Umesh Kelkar; Tza-Jing Gung; Anantha K. Subramani
Archive | 2013
Maurice E. Ewert; Anantha K. Subramani; Umesh Kelkar; Chandrasekhar Balasubramanyam; Joseph M. Ranish
