Unoh Kwon
GlobalFoundries
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Publication
Featured researches published by Unoh Kwon.
international electron devices meeting | 2015
Ruqiang Bao; Brian J. Greene; Unoh Kwon; Sungjae Lee; John Bruley; Weike Wang; Kai Zhao; Patrick W. DeHaven; Zhengwen Li; Keith Kwong Hon Wong; Stephan Grunow; Rama Divakaruni; Chung-hsun Lin; Siddarth Krishnan; Vijay Narayanan
In this paper, we develop a multiplicative model to simulate the tungsten (W) film resistivity and gate resistance for replacement metal gate (RMG) with W electrode. Our multiplicative model predicts that TiN fill offers the lower gate resistance than TiN/W fill for highly scaled gate lengths. By absorbing the results from our model into the real RMG FinFET devices, we observe that TiN fill provides ~6.4 % performance improvement compared to TiN/W fill. Meanwhile, the employment of gate conductance for gate stack film thickness monitoring is also described in our work.
Archive | 2017
Ruqiang Bao; Siddarth A. Krishnan; Unoh Kwon; Keith Kwong Hon Wong
Archive | 2014
Ruqiang Bao; Unoh Kwon; Rekha Rajaram; Keith Kwong Hon Wong
Archive | 2014
Michael P. Chudzik; Ramachandra Divakaruni; Judson R. Holt; Arvind Kumar; Unoh Kwon
Archive | 2016
Takashi Ando; Min Dai; Balaji Kannan; Siddarth A. Krishnan; Unoh Kwon
Archive | 2013
Michael P. Chudzik; Siddarth A. Krishnan; Unoh Kwon
Archive | 2016
Balaji Kannan; Rekha Rajaram; Unoh Kwon
Archive | 2014
Balaji Kannan; Unoh Kwon; Rekha Rajaram
ECS Transactions | 2014
Michael P Chudzik; Siddarth A. Krishnan; Min Dai; Shahab Siddiqui; Joseph F. Shepard; Unoh Kwon
Archive | 2017
Ruqiang Bao; Unoh Kwon; Huihang Dong; John A. Fitzsimmons
