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Vedapuram S. Achutharaman

Applied Materials

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Publication

Featured researches published by Vedapuram S. Achutharaman.

Archive | 2005

Thermal oxidation of silicon using ozone

Yoshitaka Yokota; Sundar Ramamurthy; Vedapuram S. Achutharaman; Cory Czarnik; Mehran Behdjat; Christopher S. Olsen

Archive | 1998

Method and apparatus for forming an epitaxial titanium silicide film by low pressure chemical vapor deposition

Vedapuram S. Achutharaman; Johanes Swenberg

Archive | 1999

METHOD AND APPARATUS FOR IMPROVING FILM DEPOSITION UNIFORMITY ON A SUBSTRATE

H. Peter W. Hey; Vedapuram S. Achutharaman; Johanes F. N. Swenberg

Archive | 2006

Fast axis beam profile shaping by collimation lenslets for high power laser diode based annealing system

Dean Jennings; Abhilash J. Mayur; Timothy N. Thomas; Vijay Parihar; Vedapuram S. Achutharaman; Randhir Thakur

Archive | 1996

Method of forming doped silicon in high aspect ratio openings

Mahalingam Venkatesan; Shulin Wang; Vedapuram S. Achutharaman

Archive | 2002

Method and apparatus for planarization of a material by growing a sacrificial film with customized thickness profile

Vedapuram S. Achutharaman; Juan M. Chacin; Hali J. L. Forstner

Archive | 2004

Thermally matched support ring for substrate processing chamber

Joseph M. Ranish; Aaron Muir Hunter; Jallepally Ravi; Sundar Ramamurthy; Vedapuram S. Achutharaman; Khurshed Sorabji

Archive | 2008

Fast axis beam profile shaping for high power laser diode based annealing system

Dean Jennings; Abhilash J. Mayur; Timothy N. Thomas; Vijay Parihar; Vedapuram S. Achutharaman; Randhir Thakur

Archive | 2003

Cylinder for thermal processing chamber

Sundar Ramamurthy; Vedapuram S. Achutharaman; Ho T. Fang

Archive | 2008

Controlled annealing method

Joseph M. Ranish; Ravi Jallepally; Sundar Ramamurthy; Vedapuram S. Achutharaman; Brian Haas; Aaron Muir Hunter; Wolfgang Aderhold

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Collaboration

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Sundar Ramamurthy

Applied Materials

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Cory Czarnik

Applied Materials

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Mahalingam Venkatesan

Applied Materials

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Abhilash J. Mayur

Applied Materials

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Dean Jennings

Applied Materials

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Randhir Thakur

Applied Materials

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Timothy N. Thomas

Applied Materials

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Vijay Parihar

Applied Materials

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Christopher S. Olsen

Applied Materials

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Mehran Behdjat

Applied Materials

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