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Mahalingam Venkatesan

Applied Materials

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Publication

Featured researches published by Mahalingam Venkatesan.

Archive | 1996

Semiconductor wafer process chamber with susceptor back coating

Roger N. Anderson; H. Peter W. Hey; Israel Beinglass; Mahalingam Venkatesan

Archive | 1995

Gas inlets for wafer processing chamber

Roger N. Anderson; Peter Hey; David K. Carlson; Mahalingam Venkatesan; Norma B. Riley

Archive | 1993

Deposition of silicon nitride thin films

Israel Beinglass; Mahalingam Venkatesan

Archive | 1996

Susceptor for deposition apparatus

Israel Beinglass; Mahalingam Venkatesan; Roger N. Anderson

Archive | 1996

Method of enhancing step coverage of polysilicon deposits

Israel Beinglass; Mahalingam Venkatesan

Archive | 1994

Depositing polysilicon films having improved uniformity and apparatus therefor

Israel Beinglass; Mahalingam Venkatesan; Christian M. Gronet

Archive | 2008

Patterning of magnetic thin film using energized ions

Steven Verhaverbeke; Omkaram Nalamasu; Majeed A. Foad; Mahalingam Venkatesan; Nety M. Krishna

Archive | 1996

Method of forming doped silicon in high aspect ratio openings

Mahalingam Venkatesan; Shulin Wang; Vedapuram S. Achutharaman

Archive | 2008

PATTERNING OF MAGNETIC THIN FILM USING ENERGIZED IONS AND THERMAL EXCITATION

Omkaram Nalamasu; Steven Verhaverbeke; Majeed A. Foad; Mahalingam Venkatesan; Nety M. Krishna

Archive | 1996

Process of depositing a layer of material on a wafer with susceptor back coating

Roger N. Anderson; H. Peter W. Hey; Israel Beinglass; Mahalingam Venkatesan

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Collaboration

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Israel Beinglass

Applied Materials

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Roger N. Anderson

Applied Materials

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Vedapuram S. Achutharaman

Applied Materials

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Christian M. Gronet

Applied Materials

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H. Peter W. Hey

Applied Materials

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Shulin Wang

Applied Materials

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Cory Czarnik

Applied Materials

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Klaus-Dieter Rinnen

Applied Materials

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Omkaram Nalamasu

Applied Materials

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Steven Verhaverbeke

Applied Materials

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