Randhir Thakur
Applied Materials
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Publication
Featured researches published by Randhir Thakur.
Journal of Vacuum Science & Technology B | 2003
Jeong Soo Byun; Alfred Mak; Amy Zhang; Alex Yoon; Tong Zhang; Avgerinos V. Gelatos; Robert L. Jackson; Randhir Thakur; Sang-Yun Lee; Hyoungsub Kim
The effect of ammonia (NH3) ambient annealing on a tungsten (W) film deposited by atomic layer deposition at temperatures ranging from 400–700 °C is discussed. The as-deposited film contains approximately 20 at. % of boron which is chemical bound to W (W–B) having a resistivity of 128 μΩ cm. The film has an amorphous structure, which does not transform into crystalline phase during annealing. As a result of annealing in NH3 ambient, a tungsten ternary phase (W–B–N) forms at the surface; its binding configuration depends on the annealing temperature. Below 500 °C, nitrogen is chemically bonded to tungsten (W–N) while maintaining a W–B bond. Above 600 °C, nitrogen-rich W–B–N forms, in which nitrogen atoms have chemical binding with boron (B–N) and tungsten (W–N). It was found that a film annealed at higher temperatures has a resistivity of 107 μΩ cm, and thermal desorption of boron and nitrogen containing species is not observed during the thermal process. In addition, tungsten oxide formed at the surface d...
Archive | 2003
Randhir Thakur; Alfred Mak; Ming Xi; Walter Benjamin Glenn; Ahmad A. Khan; Ayad Al-Shaikh; Avgerinos V. Gelatos; Salvador P. Umotoy
Archive | 2004
Christopher S. Olsen; Pravin K. Narwankar; Shreyas Kher; Randhir Thakur; Shankar Muthukrishnan; Philip A. Kraus
Archive | 2002
Jeong Byun; Alfred Mak; Hui Zhang; Hyungsuk Alexander Yoon; Avgerinos V. Gelatos; Robert L. Jackson; Ming Xi; Randhir Thakur
Archive | 2005
Randhir Thakur; Steve Ghanayem; Joseph Yudovsky; Aaron Webb; Adam Brailove; Nir Merry; Vinay Shah; Andreas G. Hegedus
Archive | 2002
Zheng Yuan; Steve Ghanayem; Randhir Thakur
Archive | 2014
Anchuan Wang; Zihui Li; Hiroshi Hamana; Zhijun Chen; Ching-Mei Hsu; Jiayin Huang; Nitin K. Ingle; Dmitry Lubomirsky; Shankar Venkataraman; Randhir Thakur
Archive | 2005
Randhir Thakur; Michael Splinter
Archive | 2014
Vinod R. Purayath; Randhir Thakur; Nitin K. Ingle
Archive | 2005
Sundar Ramamurthy; Andreas G. Hegedus; Randhir Thakur