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Dive into the research topics where Vinod R. Purayath is active.

Publication


Featured researches published by Vinod R. Purayath.


Archive | 2014

Dopant etch selectivity control

Vinod R. Purayath; Anchuan Wang; Nitin K. Ingle


Archive | 2014

Air gaps between copper lines

Vinod R. Purayath; Nitin K. Ingle


Archive | 2014

Metal air gap

Vinod R. Purayath; Randhir Thakur; Nitin K. Ingle


Archive | 2014

FLASH GATE AIR GAP

Vinod R. Purayath; Nitin K. Ingle


Archive | 2014

Integrated oxide and nitride recess for better channel contact in 3D architectures

Vinod R. Purayath; Randhir Thakur; Nitin K. Ingle


Archive | 2014

Integrated bit-line airgap formation and gate stack post clean

Vinod R. Purayath; Randhir Thakur; Shankar Venkataraman; Nitin K. Ingle


Archive | 2014

Integrated oxide recess and floating gate fin trimming

Vinod R. Purayath; Randhir Thakur; Shankar Venkataraman; Nitin K. Ingle


Archive | 2014

INTEGRATED OXIDE AND SI ETCH FOR 3D CELL CHANNEL MOBILITY IMPROVEMENTS

Vinod R. Purayath; Randhir Thakur; Nitin K. Ingle


Archive | 2015

Vertical gate separation

Jie Liu; Vinod R. Purayath; Xikun Wang; Anchuan Wang; Nitin K. Ingle


Archive | 2018

Charge-trap layer separation and word-line isolation for enhanced 3-D NAND structure

Vinod R. Purayath; Nitin K. Ingle

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