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Dive into the research topics where Vlasta Brusic Kaufman is active.

Publication


Featured researches published by Vlasta Brusic Kaufman.


Archive | 1997

Chemical mechanical polishing slurry useful for copper substrates

Vlasta Brusic Kaufman; Rodney C. Kistler


Archive | 1999

Chemical mechanical polishing slurry useful for copper/tantalum substrates

Vlasta Brusic Kaufman; Rodney C. Kistler; Shumin Wang


Archive | 1997

Multi-oxidizer slurry for chemical mechanical polishing

Vlasta Brusic Kaufman; Shumin Wang


Archive | 1997

Chemical mechanical polishing slurry for metal layers and films

Debra Lynn Scherber; Vlasta Brusic Kaufman; Rodney C. Kistler; Brian L. Mueller; Christopher C. Streinz


Archive | 1999

Chemical mechanical polishing method useful for copper substrates

Vlasta Brusic Kaufman; Rodney C. Kistler


Archive | 1997

Multi-oxidizer precursor for chemical mechanical polishing

Vlasta Brusic Kaufman; Shumin Wang


Archive | 2007

Chemical/mechanical polishing slurry useful for copper substrate

Vlasta Brusic Kaufman; Rodney C. Kistler; Shumin Wang; カウフマン,ブラスタ ブラシック; シー. キストラー,ロドニー; ワン,シュミン


Archive | 1997

Slurry for chemical and mechanical polishing used for metal layer and film

Vlasta Brusic Kaufman; Rodney C. Kistler; Brian L. Mueller; Debra Lynn Scherber; Christopher C. Streinz; シー.ストレンツ クリストファー; エル.シェーバー デブラ; エル.ミュラー ブライアン; ブルジク カウフマン ブラスタ; シー.キストラー ロドニー


Archive | 1997

Chemical mechanical polishing copper substrates

Vlasta Brusic Kaufman; Rodney C. Kistler; Shumin Wang


Archive | 2009

CHEMICAL MECHANICAL POLISHING SYSTEM WITH STOPPING COMPOUND AND METHOD OF USING THE SAME

Isaac K. Cherian; Steven Grumbine; Vlasta Brusic Kaufman; Shumin Wang; Renjie Zhou; ケー.グランバイン スティーブン; ケー. ケリアン,アイザック; チョウ,レンジエ; カウフマン,ブラスタ ブラシック; ワン,シュミン

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