Is this you? Create Your Porfile
Avatar

Walter R. Merry

Applied Materials

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Walter R. Merry is active.

Explore More

Publication

Featured researches published by Walter R. Merry.

Archive | 1997

Selective plasma etching of silicon nitride in presence of silicon or silicon oxides using mixture of (CH3F or CH2F2) and CF4 and O2

Cynthia B. Brooks; Walter R. Merry; Ajey M. Joshi; Gladys D. Quinones; Jitske Trevor

Archive | 1996

Etch enhancement using an improved gas distribution plate

Harald Herchen; Walter R. Merry; William Brown

Archive | 2004

Method and apparatus for in-situ film stack processing

Walter R. Merry; Quanyuan Shang; John M. White

Archive | 1995

Polymer removal from top surfaces and sidewalls of a semiconductor wafer

William Brown; Harald Herchen; Walter R. Merry; Michael Welch

Archive | 1996

Microwave-activated etching of dielectric layers

Walter R. Merry; William Brown; Harald Herchen; Michael Welch

Archive | 1998

Semiconductor fabrication process

Walter R. Merry

Archive | 2009

Efficient and accurate method for real-time prediction of the self-bias voltage of a wafer and feedback control of ESC voltage in plasma processing chamber

Zhigang Chen; Shahid Rauf; Walter R. Merry; Leonid Dorf; Kartik Ramaswamy; Kenneth S. Collins

Archive | 1997

Low volume gas distribution assembly for a chemical downstream etch tool

William Brown; Harald Herchen; Ihi Nzeadibe; Walter R. Merry

Archive | 1996

Apparatus for sidewall profile control during an etch process

Harald Herchen; Michael Welch; William Brown; Walter R. Merry

Archive | 2007

Process for wafer backside polymer removal and wafer front side photoresist removal

Kenneth S. Collins; Hiroji Hanawa; Andrew Nguyen; Shahid Rauf; Ajit Balakrishna; Valentin N. Todorow; Kartik Ramaswamy; Martin Jeffrey Salinas; Imad Yousif; Walter R. Merry; Ying Rui; Michael R. Rice

Explore More

Collaboration

Dive into the Walter R. Merry's collaboration.

Top Co-Authors
Avatar

Kartik Ramaswamy

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Shahid Rauf

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Douglas A. Buchberger

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Kenneth S. Collins

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Andrew Nguyen

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Hiroji Hanawa

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Steven Shannon

North Carolina State University

View shared research outputs
Top Co-Authors
Avatar

James D. Carducci

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

James P. Cruse

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Jennifer Y. Sun

Applied Materials

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge