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Wolf Alexander

Carl Zeiss AG

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Publication

Featured researches published by Wolf Alexander.

Archive | 2012

Illuminating system for extreme UV projection exposure system for transferring structures on photoresist, has control device controlling heating device such that quantity of heat supplied to carrier body is spatially and temporally variable

Knuefermann Markus; Endres Martin; Hettich Christian; Baer Norman; Finken Reimar; Loering Ulrich; Wolf Alexander

Archive | 2015

MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND METHOD OF CORRECTING AN ABERRATION IN SUCH AN APPARATUS

Wolf Alexander; Schwab Markus; Gruner Toralf; Hartjes Joachim; Thier Michael

Archive | 2014

Projektionsbelichtungsanlage mit hochflexiblem Manipulator

Wolf Alexander; Gruner Toralf

Archive | 2012

Projektionsbelichtungsanlage für die Mikrolithographie sowie Verfahren zur mikrolithographischen Belichtung

Hetzler Jochen; Bleidistel Sascha; Gruner Toralf; Hartjes Joachim; Schwab Markus; Wolf Alexander

Archive | 2018

OPTICAL MODULE WITH AN ANTICOLLISION DEVICE FOR MODULE COMPONENTS

Hartjes Joachim; Wolf Alexander; Gruner Toralf

Archive | 2018

Optisches Modul mit einer Antikollisionseinrichtung für Modulkomponenten

Hartjes Joachim; Wolf Alexander; Gruner Toralf

Archive | 2017

EUV LITHOGRAPHY SYSTEM AND METHOD

Wolf Alexander; Hartjes Joachim; Gruner Toralf; Golde Daniel; Mann Hans-Jürgen

Archive | 2017

Projektionsobjektiv mit einem Messstrahlengang

Wolf Alexander; Gruner Toralf

Archive | 2017

Projektionsbelichtungsverfahren, Projektionsobjektiv und Projektionsbelichtungsanlage für die Mikrolithographie

Wolf Alexander; Geh Bernd; Gruner Toralf

Archive | 2016

OPTISCHES SYSTEM EINER MIKROLITHOGRAPHISCHEN PROJEKTIONSANLAGE SOWIE VERFAHREN ZUM MESSEN EINES KIPPWINKELS

Wolf Alexander; Hartjes Joachim; Gruner Toralf

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Collaboration

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Gruner Toralf

Carl Zeiss AG

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Hartjes Joachim

Carl Zeiss AG

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Schwab Markus

Carl Zeiss AG

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Bleidistel Sascha

Carl Zeiss AG

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Golde Daniel

Carl Zeiss AG

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Hauf Markus

Carl Zeiss AG

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Baer Norman

Carl Zeiss AG

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Endres Martin

Carl Zeiss AG

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Finken Reimar

Carl Zeiss AG

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Hettich Christian

Carl Zeiss AG

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