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Endres Martin

Carl Zeiss AG

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Publication

Featured researches published by Endres Martin.

Archive | 2012

Spiegel und Projektionsbelichtungsanlage für die Mikrolithographie mit einem solchen Spiegel

Muellender Stephan; Endres Martin; Enkisch Hartmut

Archive | 2011

Abbildende Optik zur Abbildung eines Objektfeldes in ein Bildfeld sowie Beleuchtungsoptik zur Ausleuchtung eines Objektfeldes

Mann Hans-Juergen; Zellner Johannes; Dodoc Aurelian; Pretorius Marco; Menke Christoph; Endres Martin; Wilhelm Ulrich

Archive | 2012

Illuminating system for extreme UV projection exposure system for transferring structures on photoresist, has control device controlling heating device such that quantity of heat supplied to carrier body is spatially and temporally variable

Knuefermann Markus; Endres Martin; Hettich Christian; Baer Norman; Finken Reimar; Loering Ulrich; Wolf Alexander

Archive | 2016

ILLUMINATION SYSTEM AND ILLUMINATION OPTICAL UNIT FOR EUV PROJECTION LITHOGRAPHY

Endres Martin

Archive | 2017

ILLUMINATION OPTICAL ASSEMBLY FOR PROJECTION LITHOGRAPHY

Endres Martin

Archive | 2016

An illumination optic part, an illumination system, a projection exposure device and a component manufacturing method

Mann Hans-Juergen; Endres Martin; Shafer David; Warm Berndt; Herkommer Alois

Archive | 2016

Maske für die Projektionslithographie

Endres Martin; Gruner Toralf; Ruoff Johannes

Archive | 2016

Beleuchtungoptik für die Projektonslithograpfie

Endres Martin

Archive | 2016

Feldfacettenspiegel für die EUV-Projektionslithographie

Endres Martin

Archive | 2016

ILLUMINATION OPTICAL ASSEMBLY FOR A PROJECTION EXPOSURE APPARATUS

Endres Martin; Bieling Stig

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Collaboration

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Bieling Stig

Carl Zeiss AG

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Mann Hans-Juergen

Carl Zeiss AG

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Bader Dieter

Carl Zeiss AG

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Baer Norman

Carl Zeiss AG

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Dodoc Aurelian

Carl Zeiss AG

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Enkisch Hartmut

Carl Zeiss AG

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Finken Reimar

Carl Zeiss AG

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Gruner Toralf

Carl Zeiss AG

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Hainz Joachim

Carl Zeiss AG

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Herkommer Alois

Carl Zeiss AG

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