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Woo-gwan Shim

Samsung

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Publication

Featured researches published by Woo-gwan Shim.

Archive | 2000

Method of manufacturing capacitor of semiconductor device

Woo-gwan Shim; Jung-min Oh; Chang-ki Hong; Sang-jun Choi; Sang-Yong Kim

Archive | 2005

Methods of fabricating a semiconductor device using a dilute aqueous solution of an ammonia and peroxide mixture

Doo-Won Kwon; Hyung-ho Ko; Chang-Sup Mun; Woo-gwan Shim; Im-soo Park; Yu-Kyung Kim; Jeong-Nam Han

Archive | 2009

Method for treating substrate

Daehong Eom; Chang-ki Hong; Woo-gwan Shim; Young-ok Kim

Archive | 2001

Wet process for semiconductor device fabrication using anode water containing oxidative substances and cathode water containing reductive substances, and anode water and cathode water used in the wet process

Im-soo Park; Kun-tack Lee; Young-min Kwon; Sang-rok Hah; Woo-gwan Shim; Hyung-ho Ko

Archive | 2007

Composition for cleaning substrates and method of forming gate using the composition

Hyo-san Lee; Sang-Yong Kim; Chang-ki Hong; Woo-gwan Shim; Jeong-Nam Han

Archive | 2011

ETCHING, CLEANING AND DRYING METHODS USING SUPERCRITICAL FLUID AND CHAMBER SYSTEMS USING THESE METHODS

Hyo-san Lee; Chang-Ki Hong; Kun-tack Lee; Woo-gwan Shim; Jeong-Nam Han; Jung-min Oh; Kwon-Taek Lim; Ha-Soo Hwang; Haldorai Yuvaraj; Jae-Mok Jung

Archive | 2004

Method of and apparatus for removing contaminants from surface of a substrate

Moon-hee Lee; Kun-tack Lee; Woo-gwan Shim; Jong-ho Chung

Archive | 2005

Etching solution for removal of oxide film, method for preparing the same, and method of fabricating semiconductor device

Chang-Sup Mun; Hyung-ho Ko; Woo-gwan Shim; Chang-ki Hong; Sang-jun Choi

Archive | 2010

Methods of forming integrated circuit capacitors having sidewall supports and capacitors formed thereby

Dae-hyuk Kang; Bo-Un Yoon; Kun-tack Lee; Woo-gwan Shim; Ji-Hoon Cha; Im-soo Park; Hyo-san Lee; Young-Hoo Kim; Jung-min Oh

Archive | 2006

Method for cleaning substrate having exposed silicon and silicon germanium layers and related method for fabricating semiconductor device

Chang-Sup Mun; Woo-gwan Shim; Han-ku Cho; Chang-ki Hong; Doo-Won Kwon

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Chang-ki Hong

Samsung

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Jeong-Nam Han

Samsung

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Sang-jun Choi

Samsung

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Kun-tack Lee

Samsung

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Hyo-san Lee

Samsung

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Sang-Yong Kim

Samsung

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Im-soo Park

Samsung

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Jung-min Oh

Samsung

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Ji-Hoon Cha

Samsung

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Chang-Sup Mun

Samsung

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