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Hyo-san Lee

Samsung

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Publication

Featured researches published by Hyo-san Lee.

Archive | 2006

PAA-based etchant, methods of using same, and resultant structures

Hyo-san Lee; Hyung-ho Ko; Chang-ki Hong; Sang-jun Choi

Archive | 2007

Composition for cleaning substrates and method of forming gate using the composition

Hyo-san Lee; Sang-Yong Kim; Chang-ki Hong; Woo-gwan Shim; Jeong-Nam Han

Archive | 2011

ETCHING, CLEANING AND DRYING METHODS USING SUPERCRITICAL FLUID AND CHAMBER SYSTEMS USING THESE METHODS

Hyo-san Lee; Chang-Ki Hong; Kun-tack Lee; Woo-gwan Shim; Jeong-Nam Han; Jung-min Oh; Kwon-Taek Lim; Ha-Soo Hwang; Haldorai Yuvaraj; Jae-Mok Jung

Archive | 2003

Apparatus and method for removing photoresist from a substrate

Dong-Gyun Han; Woosung Han; Chang-ki Hong; Sang-jun Choi; Hyung-ho Ko; Hyo-san Lee

Archive | 2010

Methods of forming integrated circuit capacitors having sidewall supports and capacitors formed thereby

Dae-hyuk Kang; Bo-Un Yoon; Kun-tack Lee; Woo-gwan Shim; Ji-Hoon Cha; Im-soo Park; Hyo-san Lee; Young-Hoo Kim; Jung-min Oh

Archive | 2006

Method of fabricating flash memory with u-shape floating gate

Jeong-Nam Han; Dong-Chan Kim; Chang-Jin Kang; Kyeong-koo Chi; Woo-gwan Shim; Hyo-san Lee; Chang-ki Hong; Sang-jun Choi

Archive | 2009

Composition for etching silicon oxide layer, method for etching semiconductor device using the same, and composition for etching semiconductor device

Go-Un Kim; Hyo-san Lee; Myungkook Park; Ho-Seok Yang; Jeong-Nam Han; Chang-ki Hong

Microelectronic Engineering | 2009

Improved etching method for microelectronic devices with supercritical carbon dioxide

Jae Hyun Bae; Md. Zahangir Alam; Jae Mok Jung; Yeong-Soon Gal; Hyo-san Lee; Hyun-Gyu Kim; Kwon Taek Lim

Archive | 2012

Methods of Manufacturing a Three-Dimensional Semiconductor Device

Young-Hoo Kim; Sang Won Bae; Kun-tack Lee; Hyo-san Lee

Archive | 2011

Substrate treatment equipment and method of treating substrate using the same

Jung-min Oh; Kun-tack Lee; Hyo-san Lee; Young-Hoo Kim; Jungwon Lee; Sang Won Bae; Yong-jhin Cho

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Collaboration

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Kun-tack Lee

Samsung

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Chang-ki Hong

Samsung

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Sang-jun Choi

Samsung

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Hyung-ho Ko

Samsung

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Jeong-Nam Han

Samsung

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Jung-min Oh

Samsung

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Woo-gwan Shim

Samsung

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Yong-Sun Ko

Samsung

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Kyoungseob Kim

Samsung

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Seok-Hoon Kim

Samsung

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