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Xuyen Pham

Lam Research

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Publication

Featured researches published by Xuyen Pham.

Archive | 2002

SYSTEM AND METHOD FOR POINT OF USE DELIVERY, CONTROL AND MIXING CHEMICAL AND SLURRY FOR CMP/CLEANING SYSTEM

Xuyen Pham; Tuan Nguyen; Vien Quach; Ren Zhou

Archive | 2003

Polishing pad and method of manufacture

Xuyen Pham

Archive | 2000

Interlocking chemical mechanical polishing system

John M. Boyd; Katgenahalli Y. Ramanujam; Sridharan Srivatsan; Xuyen Pham

Archive | 2003

Method and apparatus for heating polishing pad

Xuyen Pham; Tuan Nguyen; Ren Zhou; David Wei; Linda Jiang; Katgenhalli Y. Ramanujam; Joseph P. Simon; Tony Luong; Sridharan Srivatsan; Anjun Jerry Jin

Archive | 2003

Methods and systems for controlling belt surface temperature and slurry temperature in linear chemical mechanical planarization

Patrick P. H. Wu; Xuyen Pham; Tuan A. Nguyen; Ren Zhou

Archive | 2002

Molded end point detection window for chemical mechanical planarization

Cangshan Xu; Patrick P. H. Wu; Xuyen Pham

Archive | 2005

Porous material air bearing platen for chemical mechanical planarization

Xuyen Pham

Archive | 2004

Polishing head assembly

Xuyen Pham

Archive | 2000

Polishing apparatus and substrate retainer ring providing continuous slurry distribution

Xuyen Pham; Joe Simon

Archive | 2003

Substrate holding and spinning assembly and methods for making the same

Gregory R. Bettencourt; Anthony de la Llera; Xuyen Pham

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Ren Zhou

Lam Research

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Anthony de la Llera

Lam Research

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Tony Luong

Lam Research

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Tuan A. Nguyen

Lam Research

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Patrick P. H. Wu

Lam Research

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Tuan Nguyen

Lam Research

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Andrew Siu

Lam Research

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Cangshan Xu

Lam Research

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David Wei

Lam Research

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Simon McClatchie

Lam Research

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