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Yoshinori Nakayama

Canon Inc.

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Publication

Featured researches published by Yoshinori Nakayama.

Archive | 2004

Method of charged particle beam lithography and equipment for charged particle beam lithography

Sayaka Tanimoto; Yasunari Sohda; Yoshinori Nakayama; Osamu Kamimura; Haruo Yoda; Masaki Hosoda

Archive | 2004

Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus using deflector

Haruhito Ono; Masatake Akaike; Kenji Tamamori; Futoshi Hirose; Yasushi Koyama; Atsunori Terasaki; Kenichi Nagae; Yoshinori Nakayama

Archive | 2005

Measurement method of electron beam current, electron beam writing system and electron beam detector

Makoto Sakakibara; Yoshinori Nakayama; Hiroya Ohta; Yasunari Sohda; Noriyuki Tanaka; Yasuhiro Someda

Archive | 2004

Charged particle beam exposure method and apparatus and device manufacturing method using the apparatus

Masato Muraki; Yoshinori Nakayama; Hiroya Ohta; Haruo Yoda; Norio Saitou

Archive | 2003

Array structure and method of manufacturing the same, charged particle beam exposure apparatus, and device manufacturing method

Kenji Tamamori; Masato Muraki; Yuichi Iwasaki; Yoshinori Nakayama; Kouji Asano; Yoshiaki Moro; Masayoshi Esashi

Archive | 2003

Electron beam exposure apparatus and electron beam measurement module

Masaki Takakuwa; Yoshinori Nakayama; Gen Nakamura

Archive | 2003

Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus

Yuichi Iwasaki; Masato Muraki; Kenji Tamamori; Kouji Asano; Masayoshi Esashi; Yoshinori Nakayama; Shinichi Hashimoto; Yoshiaki Moro

Archive | 2003

Multi-charged beam lens, charged-particle beam exposure apparatus using the same, and device manufacturing method

Haruhito Ono; Kenichi Nagae; Masaki Takakuwa; Yoshinori Nakayama; Harunobu Muto

Archive | 2006

Electron beam writing system and electron beam writing method

Yoshinori Nakayama; Hiroya Ohta; Makoto Sakakibara; Yasunari Sohda; Masaki Hosoda

Archive | 2004

Method and equipment for charged particle beam lithography

Sayaka Tanimoto; Yasunari Sohda; Yoshinori Nakayama; Osamu Kamimura; Haruo Yoda; Masaki Hosoda

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Yasunari Sohda

Canon Inc.

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Masaki Takakuwa

Canon Inc.

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Masato Muraki

Canon Inc.

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Haruo Yoda

Canon Inc.

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Hiroya Ohta

Canon Inc.

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Kenichi Nagae

Canon Inc.

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Kenji Tamamori

Canon Inc.

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Masaki Hosoda

Canon Inc.

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Osamu Kamimura

Canon Inc.

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Haruhito Ono

Canon Inc.

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